Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking

Surface and Coatings Technology

Volumn 206, Issue 19-20, 2012, Pages 4230-4234

  Musil, J ^a   Jilek R ^a   Meissner, M ^a   Tolg T ^a   Cerstvy R ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Al based composites; Mechanical properties; Oxynitride; Pulsed inlet of oxygen; Reactive sputtering; Two phase nanocomposites

Indexed keywords

AL-BASED COMPOSITES; AMORPHOUS PHASE; DC PULSED REACTIVE SPUTTERING; DUAL MAGNETRONS; ELASTIC FILMS; ELASTIC RECOVERY; FILM STRUCTURE; HIGH HARDNESS; HIGH RESISTANCE; NANOCRYSTALLINES; OXYGEN PULSE; OXYNITRIDES; RESISTANCE TO CRACKING; SINGLE LAYER; YOUNG'S MODULUS;

AMORPHOUS FILMS; ELASTICITY; MECHANICAL PROPERTIES; NANOCOMPOSITE FILMS; NANOCOMPOSITES; NITRIDES; OXYGEN; REACTIVE SPUTTERING;

ALUMINUM;

EID: 84861460256     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.04.028     Document Type: Article

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