Statistical evaluation of refractive index, growth rate, hardness and Young's modulus of aluminum oxynitride films

Thin Solid Films

Volumn 354, Issue 1, 1999, Pages 43-49

  Dreer, Sabine ^a   Krismer, Robert ^b   Wilhartitz, Peter ^b   Friedbacher, Gernot ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b PLANSEE SE   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; COMPUTER SOFTWARE; ELASTIC MODULI; ELLIPSOMETRY; GROWTH (MATERIALS); HARDNESS; MAGNETRON SPUTTERING; REFRACTIVE INDEX; STATISTICAL METHODS; SUBSTRATES;

SPECTROSCOPIC ELLIPSOMETRY;

AMORPHOUS FILMS;

EID: 0033365899     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00564-7     Document Type: Article

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