Silicon photonic resonator sensors and devices

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 8236, Issue , 2012, Pages

  Chrostowski, Lukas ^a   Grist, Samantha ^a   Flueckiger, Jonas ^a   Shi, Wei ^a   Wang, Xu ^a   Ouellet, Eric ^a   Yun, Han ^a   Webb, Mitch ^a   Nie, Ben ^a   Liang, Zhen ^a   Cheung, Karen C ^a   Schmidt, Shon A ^b   Ratner, Daniel M ^b   Jaeger, Nicolas A F ^a  

^a UNIVERSITY OF BRITISH COLUMBIA   (Canada)

^b University of Washington   (United States)

Author keywords

disk resonators; evanescent optical field sensors; lab on a chip; microfluidics; optical waveguides; ring resonators; silicon photonics; slot waveguides

Indexed keywords

DISK RESONATOR; LAB-ON-A-CHIP; OPTICAL FIELD; RING RESONATOR; SILICON PHOTONICS; SLOT WAVEGUIDE;

CURRICULA; DESIGN; EXPERIMENTS; FABRICATION; FLUIDICS; HUMAN ENGINEERING; LASER RESONATORS; MICROFLUIDICS; NANOPHOTONICS; NATURAL FREQUENCIES; OPTICAL WAVEGUIDES; PHOTONIC DEVICES; REFRACTIVE INDEX; SENSORS; SILICON WAFERS; STUDENTS; WAVEGUIDES;

OPTICAL RESONATORS;

EID: 84861235858     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.916860     Document Type: Conference Paper

References (59)

1. Washburn, A. L., Gunn, L. C., and Bailey, R. C., "Label-free quantitation of a cancer biomarker in complex media using silicon photonic microring resonators," Analytical Chemistry 81(22), 9499-9506 (2009). doi: 10.1021/ac902006p.
2. White, I. and Fan, X., "On the performance quantification of resonant refractive index sensors," Optics Express 16(2), 1020 (2008).
3. Yang, G. M., White, I. M., and Fan, X. D., "An opto-fluidic ring resonator biosensor for the detection of organophosphorus pesticides," Sensors and Actuators B: Chemical 133(1), 105-112 (2008).
4. Passaro, V. M. N., Dell'Olio, F., Ciminelli, C., and Armenise, M. N., "Efficient chemical sensing by coupled slot soi waveguides," Sensors 9(2), 1012-1032 (2009).
5. De Vos, K., Bartolozzi, I., Schacht, E., Bienstman, P., and Baets, R., "Silicon-on-insulator microring resonator for sensitive and label-free biosensing," Optics Express 15(12), 7610-7615 (2007).
6. Ramachandran, A., Wang, S., Clarke, J., Ja, S. J., Goad, D., Wald, L., Flood, E. M., Knobbe, E., Hryniewicz, J. V., Chu, S. T., Gill, D., Chen,W., King, O., and Little, B. E., "A universal biosensing platform based on optical micro-ring resonators," Biosensors and Bioelectronics 23(7), 939-944 (2008).
7. Claes, T., Molera, J. G., De Vos, K., Schacht, E., Baets, R., and Bienstman, P., "Label-free biosensing with a slot-waveguide- based ring resonator in silicon on insulator," IEEE Photonics Journal 1(3), 197-204 (2009).
8. Carlborg, C. F., Gylfason, K. B., Kazmierczak, A., Dortu, F., Polo, M. J. B., Catala, A. M., Kresbach, G. M., Sohlstrom, H., Moh, T., Vivien, L., Popplewell, J., Ronan, G., Barrios, C. A., Stemme, G., and van der Wijngaart, W., "A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,"Lab on a chip 10(3), 281-290 (2010).
9. Luchansky, M. and Bailey, R., "Silicon photonic microring resonators for quantitative cytokine detection and t-cell secretion analysis," Analytical chemistry 82(5), 1975-1981 (2010).
10. Iqbal, M., Gleeson, M., Spaugh, B., Tybor, F., Gunn, W., Hochberg, M., Baehr-Jones, T., Bailey, R., and Gunn, L., "Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation," IEEE Journal of Selected Topics in Quantum Electronics 16(3), 654-661 (2010).
11. Fan, X. D., White, I. M., Shopoua, S. I., Zhu, H. Y., Suter, J. D., and Sun, Y. Z., "Sensitive optical biosensors for unlabeled targets: A review," Analytica Chimica Acta 620(1-2), 8-26 (2008).
12. Passaro, V. M. N., Dell'Olio, F., Casamassima, B., and De Leonardis, F., "Guided-wave optical biosensors," Sensors 7(4), 508-536 (2007).
13. Vlasov, Y. and McNab, S., "Losses in single-mode silicon-on-insulator strip waveguides and bends," Optics Express 12(8), 1622-1631 (2004).
14. Densmore, A., Xu, D., Waldron, P., Janz, S., Cheben, P., Lapointe, J., Delge, A., Lamontagne, B., Schmid, J., and Post, E., "A silicon-on-insulator photonic wire based evanescent field sensor," IEEE Photonics Technology Letters 18(23), 2520-2522 (2006).
15. Baehr-Jones, T., Hochberg, M., Walker, C., and Scherer, A., "High-Q optical resonators in silicon-on-insulator-based slot waveguides," Applied Physics Letters 86(8), - (2005).
16. Barrios, C. A., Gylfason, K. B., Sanchez, B., Griol, A., Sohlstrom, H., Holgado, M., and Casquel, R., "Slot-waveguide biochemical sensor," Optics Letters 32(21), 3080-3082 (2007).
17. Dell'Olio, F. and Passaro, V. M. N., "Optical sensing by optimized silicon slot waveguides," Optics Express 15(8), 4977-4993 (2007).
18. Barrios, C. A., Banuls, M. J., Gonzalez-Pedro, V., Gylfason, K. B., Sanchez, B., Griol, A., Maquieira, A., Sohlstrom, H., Holgado, M., and Casquel, R., "Label-free optical biosensing with slot-waveguides," Optics Letters 33(7), 708-710 (2008).
19. Keivani, H. and Kargar, A., "Bending efficiency of bent multiple-slot waveguides," Chinese Physics Letters 26(12),- (2009).
20. Boyd, R. and Heebner, J., "Sensitive disk resonator photonic biosensor," Applied Optics 40(31), 5742-5747 (2001).
21. Armani, A., Kulkarni, R., Fraser, S., Flagan, R., and Vahala, K., "Label-free, single-molecule detection with optical microcavities," Science 317(5839), 783 (2007).
22. Jeong, H., Lee, S., Sung, G., and Shin, J., "Design and fabrication of Tb3+-doped silicon oxy-nitride microdisk for biosensor applications," IEEE Photonics Technology Letters 23(2), 88-90 (2011).
23. Mandal, S. and Erickson, D., "Nanoscale optofluidic sensor arrays," Optics Express 16(3), 1623 (2008).
24. Prabhathan, P., Murukeshan, V., Jing, Z., and Ramana, P., "Compact SOI nanowire refractive index sensor using phase shifted bragg grating," Optics Express 17(17), 15330-15341 (2009).
25. Arce, C., De Vos, K., Claes, T., Komorowska, K., Van Thourhout, D., and Bienstman, P., "Silicon-on-insulator microring resonator sensor integrated on an optical fiber facet," IEEE Photonics Technology Letters 23(13) (2011).
26. Monat, C., Domachuk, P., and Eggleton, B. J., "Integrated optofluidics: A new river of light," Nature Photonics 1(2), 106-114 (2007).
27. Gylfason, K. B., Carlborg, C. F., Kazmierczak, A., Dortu, F., Sohlstrom, H., Vivien, L., Barrios, C. A., van der Wijngaart, W., and Stemme, G., "On-chip temperature compensation in an integrated slot-waveguide ring resonator refractive index sensor array," Optics Express 18(4), 3226-3237 (2010).
28. Xu, D. X., Densmore, A., Delage, A., Waldron, P., McKinnon, R., Janz, S., Lapointe, J., Lopinski, G., Mischki, T., Post, E., Cheben, P., and Schmid, J. H., "Folded cavity soi microring sensors for high sensitivity and real time measurement of biomolecular binding," Optics Express 16(19), 15137-15148 (2008).
29. Kirk, J., Fridley, G., Chamberlain, J., Christensen, E., Hochberg, M., and Ratner, D., "Multiplexed inkjet functionalization of silicon photonic biosensors," Lab on a Chip (2011).
30. Narayanaswamy, R. and Wolfbeis, O., [Optical sensors: industrial, environmental and diagnostic applications], vol. 1, Springer Verlag (2004).
31. Bailey, R. C., Washburn, A. L., Qavi, A. J., Iqbal, M., Gleeson, M., Tybor, F., and Gunn, L. C., "A robust silicon photonic platform for multiparameter biological analysis," 72200N-72200N-6 (2009).
32. Adam, B., Qu, Y., Davis, J., Ward, M., Clements, M., Cazares, L., Semmes, O., Schellhammer, P., Yasui, Y., and Feng, Z., "Serum protein fingerprinting coupled with a pattern-matching algorithm distinguishes prostate cancer from benign prostate hyperplasia and healthy men," Cancer Research 62(13), 3609 (2002).
33. Washburn, A., Luchansky, M., Bowman, A., and Bailey, R., "Quantitative, label-free detection of five protein biomarkers using multiplexed arrays of silicon photonic microring resonators," Anal Chem 82(1), 69-72 (2009).
34. Qavi, A. and Bailey, R., "Multiplexed detection and labelfree quantitation of micrornas using arrays of silicon photonic microring resonators," Angewandte Chemie International Edition 49(27), 4608-4611 (2010).
35. Yan, R., Kingry, L. C., Slayden, R. A., and Lear, K. L., "Immunoassay demonstration using a local evanescent array coupled biosensor," 75590D-75590D-7 (2010).
36. Hochberg, M. and Baehr-Jones, T., "Towards fabless silicon photonics," Nature Photonics 4(8), 492-494 (2010).
37. Yoshie, T., Tang, L., and Su, S., "Optical microcavity: Sensing down to single molecules and atoms," Sensors 11(2), 1972-1991 (2011).
38. Ackert, J., Doylend, J., Logan, D., Jessop, P., Vafaei, R., Chrostowski, L., and Knights, A., "Defect-mediated resonance shift of silicon-on-insulator racetrack resonators," Optics Express 19(13), 11969-11976 (2011).
39. Baehr-Jones, T., Hochberg, M., Walker, C., Chan, E., Koshinz, D., Krug, W., and Scherer, A., "Analysis of the tuning sensitivity of silicon-on-insulator optical ring resonators," IEEE Journal of Lightwave Technology 23(12), 4215 (2005).
40. Markov, D., Begari, D., and Bornhop, D., "Breaking the 10-7 barrier for ri measurements in nanoliter volumes,"Analytical chemistry 74(20), 5438-5441 (2002).
41. Xu, D., Vachon, M., Densmore, A., Ma, R., Janz, S., Delge, A., Lapointe, J., Cheben, P., Schmid, J., Post, E., et al., "Real-time cancellation of temperature induced resonance shifts in soi wire waveguide ring resonator label-free biosensor arrays," Optics Express 18(22), 22867-22879 (2010).
42. Lukosz, W., "Principles and sensitivities of integrated optical and surface plasmon sensors for direct affinity sensing and immunosensing," Biosensors and Bioelectronics 6(3), 215-225 (1991).
43. "http://www.biacore.com/,"
44. Unger, M., Chou, H., Thorsen, T., Scherer, A., and Quake, S., "Monolithic microfabricated valves and pumps by multilayer soft lithography," Science 288(5463), 113 (2000).
45. Ksendzov, A. and Lin, Y., "Integrated optics ring-resonator sensors for protein detection," Optics Letters 30(24), 3344-3346 (2005).
46. Xia, Y. N. and Whitesides, G. M., "Soft lithography," Annual Review of Materials Science 28, 153-184 (1998). 110TC Times Cited:1318 Cited References Count:184.
47. DowChemical, "Optim glycerine refractive index," (2011).
48. Flueckiger, J., Grist, S., Bisra, G., Chrostowski, L., and Cheung, K., "Cascaded silicon-on-insulator microring resonators for the detection of biomolecules in PDMS microfluidic channels," Proceedings of SPIE 7929, 79290I (2011).
49. Rouger, N., Chrostowski, L., and Vafaei, R., "Temperature effects on silicon-on-insulator (SOI) racetrack resonators: a coupled analytic and 2D finite difference approach," IEEE Journal of Lightwave Technology 28(9), 1380-1391 (2010).
50. "http://www.lumerical.com/mode/," Lumerical Solutions MODE .
51. Wang, X., Shi, W., Grist, S., Yun, H., and Chrostowski, N. A. F. J., "Narrow-band transmission filter using phase-shifted bragg gratings in SOI waveguide," IEEE Photonics Conference, ThZ1 (10/2011 2011).
52. Borselli, M., Johnson, T., and Painter, O., "Beyond the rayleigh scattering limit in high-q silicon microdisks: theory and experiment," Opt. Express 13, 1515-1530 (Mar 2005).
53. Morand, A., Zhang, Y., Martin, B., Huy, K. P., Amans, D., Benech, P., Verbert, J., Hadji, E., and Fédéli, J.-M., "Ultra-compact microdisk resonator filters on soi substrate," Opt. Express 14, 12814-12821 (Dec 2006).
54. Soltani, M., Li, Q., Yegnanarayanan, S., and Adibi, A., "Toward ultimate miniaturization of high Q silicon traveling-wave microresonators," Optics Express 18(19), 19541-19557 (2010).
55. "http://www.lumerical.com/fdtd/," Lumerical Solutions FDTD .
56. Homola, J., Koudela, I., and Yee, S., "Surface plasmon resonance sensors based on diffraction gratings and prism couplers: sensitivity comparison," Sensors and Actuators B: Chemical 54(1-2), 16-24 (1999).
57. Kou, L., Labrie, D., and Chylek, P., "Refractive indices of water and ice in the 0.65- to 2.5-μm spectral range,"Applied Optics 32, 3531-3540 (Jul 1993).
58. Shi, W., Vafaei, R., Torres, M., Jaeger, N., and Chrostowski, L., "Design and characterization of microring reflectors with a waveguide crossing," Optics Letters 35(17), 2901-2903 (2010).
59. Flueckiger, J., Grist, S. M., Ouellet, E., Chrostowski, L., and Cheung, K. C., "Label-free biosensing using cascaded silicon-on-insulator micro-racetrack resonators integrated with PDMS microfluidic channels," International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS), 565-567 (Oct. 2011).