Toward ultimate miniaturization of high Q silicon traveling-wave microresonators

Optics Express

Volumn 18, Issue 19, 2010, Pages 19541-19557

  Soltani, Mohammad ^a   Li, Qing ^a   Yegnanarayanan, Siva ^a   Adibi, Ali ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISKS (STRUCTURAL COMPONENTS); MINIATURE INSTRUMENTS; PHOTONIC CRYSTALS; SEMICONDUCTOR JUNCTIONS; SILICON COMPOUNDS; SILICON OXIDES; VLSI CIRCUITS;

BOX LAYERS; BUILDING BLOCKES; DOWN-SCALING; FREE SPECTRAL RANGE; MICRO RESONATORS; MICRODISKS; MODE VOLUME; P-N JUNCTION; PHOTONIC INTEGRATED CIRCUITS; SINGLE MODE OPERATION; TRAVELING WAVE; VLSI PHOTONICS; WAVELENGTH RANGES;

RESONATORS;

SILICON;

ARTICLE; CHEMISTRY; COMPUTER AIDED DESIGN; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MICROELECTROMECHANICAL SYSTEM; OPTICAL INSTRUMENTATION; REFRACTOMETRY; TRANSDUCER;

COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MINIATURIZATION; OPTICAL DEVICES; REFRACTOMETRY; SILICON; TRANSDUCERS;

EID: 77957012130     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.019541     Document Type: Article

References (27)

1. M. Lipson, "Silicon photonics: An exercise in self control," Nat. Photonics 1(1), 18-19 (2007).
2. C. Gunn, "CMOS Photonics for High-Speed Interconnects," IEEE Micro 26(2), 58-66 (2006).
3. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435(7040), 325-327 (2005).
4. J. Ahn, M. Fiorentino, R. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. Jouppi, M. McLaren, C. Santori, R. Schreiber, S. Spillane, D. Vantrease, and Q. Xu, "Devices and architectures for photonic chip-scale integration," Appl. Phys., A Mater. Sci. Process. 95(4), 989-997 (2009).
5. M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, "Tunable silicon microring resonator with wide free special range," Appl. Phys. Lett. 89(7), 071110 (2006).
6. Q. Xu, D. Fattal, and R. G. Beausoleil, "Silicon microring resonators with 1.5-μm radius," Opt. Express 16(6), 4309-4315 (2008).
7. S. Xiao, M. H. Khan, H. Shen, and M. Qi, "A highly compact third-order silicon microring add-drop filter with a very large free spectral range, a flat passband and a low delay dispersion," Opt. Express 15(22), 14765-14771 (2007).
8. M. R. Watts, D. C. Trotter, R. W. Young, and A. L. Lentine, Ultra-low power silicon microdisk modulators and switches," IEEE Conf. Group IV Photonics, Sorento, Italy, 2008.
9. S. Manipatruni, L. Chen, K. Preston, and M. Lipson, "Ultra-low power electro-optic modulator on silicon: towards direct logic driven silicon modulators," Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, 2010.
10. M. Soltani, Q. Li, S. Yegnanarayanan, and A. Adibi, "Ultimate iniaturization of single and coupled resonator filters in silicon photonics," Conference on Laser and Electro-optics (CLEO), Baltimore, MD, 2009.
11. J. Shainline, S. Elston, Z. Liu, G. Fernandes, R. Zia, and J. Xu, "Subwavelength silicon microcavities," Opt. Express 17(25), 23323-23331 (2009).
12. A. M. Prabhu, A. Tsay, Z. Han, and V. Van, "Ultracompact SOI microring add-drop filter with wide bandwidth and wide FSR," IEEE Photon. Technol. Lett. 21(10), 651-653 (2009).
13. K. Srinivasan, M. Borselli, O. Painter, A. Stintz, and S. Krishna, "Cavity Q, mode volume, and lasing threshold in small diameter AlGaAs microdisks with embedded quantum dots," Opt. Express 14(3), 1094-1105 (2006).
14. M. Soltani, Q. Li, S. Yegnanrayanan, B. Momeni, A. A. Eftekhar, and A. Adibi, "Large-scale array of small high-Q microdisk resonators for on-chip spectral analysis," IEEE LEOS Conference, Turkey, 2009.
15. F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, "Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects," Opt. Express 15(19), 11934-11941 (2007).
16. M. Soltani, S. Yegnanarayanan, and A. Adibi, "Ultra-high Q planar silicon microdisk resonators for chip-scale silicon photonics," Opt. Express 15(8), 4694-4704 (2007). (Pubitemid 46609015)
17. M. Borselli, T. Johnson, and O. Painter, "Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment," Opt. Express 13(5), 1515-1530 (2005).
18. C. P. Michael, M. Borselli, T. J. Johnson, C. Chrystal, and O. Painter, "An optical fiber-taper probe for waferscale microphotonic device characterization," Opt. Express 15(8), 4745-4752 (2007).
19. M. Soltani, Q. Li, S. Yegnanarayanan, and A. Adibi, "Improvement of thermal properties of ultra-high Q silicon microdisk resonators," Opt. Express 15(25), 17305-17312 (2007). (Pubitemid 350260586)
20. T. J. Johnson, M. Borselli, and O. Painter, "Self-induced optical modulation of the transmission through a high-Q silicon microdisk resonator," Opt. Express 14(2), 817-831 (2006).
21. M. Soltani, Novel integrated silicon nanophotonic structures using ultra-high Q resonator, Ph.D. dissertation, Georgia Institute of Technology, 2009.
22. F. L. Teixeira, and W. C. Chew, "Systematic derivation of anisotropic PML absorbing media in cylindrical and spherical coordinates," IEEE Microwave Guided Wave Lett. 7(11), 371-373 (1997).
23. M. Soltani, S. Yegnanarayanan, Q. Li, and A. Adibi, "Systematic engineering of waveguide-resonator coupling for silicon microring/microdisk/ racetrack resonators: theory and experiment," IEEE J. Quantum Electron. 46(8), 1158-1169 (2010).
24. W. M. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, "Ultra-compact, low RF power, 10 Gb/s silicon Mach- Zehnder modulator," Opt. Express 15(25), 17106-17113 (2007).
25. M. Borselli, High-Q microresonators as lasing elements for silicon photonics, Ph.D dissertation, California Institute of Technology, 2006.
26. C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, "Coupling of modes analysis of resonant channel add-drop filtering," J. Lightwave Technol. 35, 1322 (1999).
27. A. H. Atabaki, A. A. Eftekhar, S. Yegnanarayanan, and A. Adibi, "Novel micro-heater structure for low-power and fast photonic reconfiguration," Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, 2010.