Investigations on the origin of mass and elastic loading in the time varying distinct response of ZnO SAW ammonia sensor

Sensors and Actuators, B: Chemical

Volumn 166-167, Issue , 2012, Pages 576-585

  Bhasker Raj, V ^a   Nimal, A T ^b   Parmar, Yashoda ^b   Sharma, M U ^b   Gupta, Vinay ^a  

^a UNIVERSITY OF DELHI   (India)

^b SOLID STATE PHYSICS LABORATORY   (India)

Author keywords

Ammonia; SAW; Sensing mechanism; Sensor

Indexed keywords

ACOUSTO-ELECTRIC; AMMONIA SENSORS; DIFFERENTIAL FREQUENCY; DOMINANT MECHANISM; ELECTRICAL MEASUREMENT; MASS LOADINGS; MOIST AMMONIA; RF-SPUTTERING; SAW RESONATORS; SAW SENSORS; SENSING MECHANISM; SENSING RESPONSE; SENSOR RESPONSE; TIME VARYING; ZNO; ZNO FILMS; ZNO THIN FILM;

AMMONIA; METALLIC FILMS; OPTICAL FILMS; SAWS; SENSORS; SURFACE ROUGHNESS; ZINC OXIDE;

LOADING;

EID: 84861199928     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.03.013     Document Type: Article

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