Fabrication of polymer SAW sensor array to classify chemical warfare agents

Sensors and Actuators, B: Chemical

Volumn 121, Issue 1, 2007, Pages 47-53

  Joo, Byung Su ^a   Huh, Jeung Soo ^a   Lee, Duk Dong ^a  

^a Kyungpook National University   (South Korea)

Author keywords

Chemical warfare agent; PBD; PDMS; PECH; PIB; PIP; SAW sensor array

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; CHEMICAL WARFARE; ORGANIC SOLVENTS; POLYBUTADIENES; POLYISOPRENES; POLYMERS; PRINCIPAL COMPONENT ANALYSIS; TRANSDUCERS;

CHEMICAL WARFARE AGENTS; INTERDIGITAL TRANSDUCER (IDT); POLYDIMETHYLSILOXANE (PDMS); POLYEPICHLOROHYDRIN (PECH); POLYISOBUTYLENE (PIB);

CHEMICAL SENSORS;

EID: 33846412939     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.09.013     Document Type: Article

References (20)

1. Lee J.C. Chemical weapons destruction technology (I). J. Korea Solid Wastes Eng. Soc. 16 (1999) 205-216
2. Sarro P.M. Sensor technology strategy in silicon. Sens. Actuators A 31 (1992) S.138-S.143
3. Lim J.W., Kim H.H., Kang B.W., and Lee D.D. Fabrication characteristics of suspended-type micro gas sensor. J. Korean Phys. Soc. 33 (1998) s432-s435
4. Cho S.B., Pak J.J.H., Hong J.S., and Kimpak Y.M. Fabrication of a multi-electrode array dna sensor for electrochemical genotyping. J. Korean Phys. Soc. 41 (2002) 1054-1057
5. Grate J.W., Patrash S.J., and Kaganove S.N. Inverse least-squares modeling of vapor descriptors using polymer-coated surface acoustic wave sensor array responses. Anal. Chem. 73 (2001) 5247-5259
6. Dominguez D.D., Chung R., Nguyen V., Tevault D., and McGill R.A. Evaluation of SAW chemical sensors for air filter lifetime and performance monitoring. Sens. Actuators B 53 (1998) 186-190
7. Campbell C.K. Surface Acoustic Wave Devices for Mobile and Wireless Communications (1998), Academic Press, INC. pp. 327-358
8. White R.M., and Voltmer R.W. Direct piezoelectric coupling to surface elastic waves. Appl. Phys. Lett. 7 (1965) 314-316
9. Shibata T., Hori Y., Asai K., Nakamura Y., Tanaka M., Kaigawa K., Shibata J., and Sakai H. 2.4 GHz SAW filters using AIN deposited on off-angle R-plane sapphire substrates by MOCVD. IEEE Ultrason. Symp. (2000) 287-297
10. Ballantine D.S., Martin S.J., Ricco A.J., Frye G.C., Wohltien H., White R.M., and Zellers E.T. Acoustic Wave Sensors, Theory Design and Physico-Chemical Applications (1997), Academic Press, San Diego pp. 647-657
11. Bertilsson L., Kamloth K.P., and Lieb H.D. Molecular interaction of DMMP and water vapor with mixed self-assembled monolayers studied by IR spectroscopy and SAW devices. Thin Solid Films 284 (1996) 882-887
12. Dominguez D.D., Chung R., Nguyen V., Tevault D., and McGill R.A. Evaluation of SAW chemical sensors for air filter lifetime and performance monitoring. Sens. Actuators B 53 (1998) 186-190
13. Wohltjen H. Mechanism of operation and design considerations for surface acoustic wave device vapour sensors. Sens. Actuators 5 (1984) 307-325
14. Martin S.J., Ricco A.J., Niemczyk T.M., and Frye G.C. Acoustic wave devices for chemical sensing. Sens. Actuators 20 (1989) 253-268
15. Rapp M., Reibel J., Stahl U., Stier S., and Voigt A. Influence of phase position on the chemical response of oscillator driven polymer coated SAW resonators. Proc. IEEE Freq. Contr. Symp. (1998) 621-629
16. Patrash S.J., and Zellers E.T. Characterization of polymeric surface acoustic wave sensor coatings and semi empirical models of sensor responses to organic vapors. Anal. Chem. 65 (1993) 2055-2066
17. Bodenhofer K., Hierlemann A., Noetzel G., Weimar U., and Gopel W. Performances of mass sensitive devices for gas sensing: thickness shear mode and surface acoustic wave transducers. Anal. Chem. 68 (1996) 2210-2218
18. Ferry J.D. Vsicoelastic Properties of Polymer. third ed. (1980), Wiley, New York (Chapter 1)
19. Mark J.E. Polymer Data Handbook (1996), Oxford University Press Inc.
20. Lee Y.S., Joo B.S., Choi N.J., Kang B.H., and Lee D.D. Pattern recognition of a gas sensor array using impedance. J. Korean Phys. Soc. 37 (2000) 862-865