Dual SAW sensor technique for determining mass and modulus changes

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 48, Issue 1, 2001, Pages 262-267

  Hietala, Susan L ^a   Hietala, Vincent M ^b   Jeffrey Brinker, C ^c  

^a Emcore PV   (United States)

^b QDI   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAS ADSORPTION; QUARTZ; SEMICONDUCTING GALLIUM ARSENIDE; SENSORS;

DUAL SENSOR TECHNIQUES; MODULUS CHANGES;

ACOUSTIC SURFACE WAVE DEVICES;

ARTICLE;

EID: 0034745860     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.896138     Document Type: Article

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