SAW-based gas sensors with rf sputtered InOx and PECVD SiNx films: Response to H2 and O3 gases

Sensors and Actuators, B: Chemical

Volumn 118, Issue 1-2, 2006, Pages 362-367

  Fechete, A C ^a   Wlodarski, W ^a   Kalantar Zadeh, K ^a   Holland, A S ^a   Antoszewski, J ^b   Kaciulis, S ^c   Pandolfi, L ^c  

^a RMIT UNIVERSITY   (Australia)

^b UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

^c CNR   (Italy)

Author keywords

Hydrogen; Ozone; PECVD; SAW gas sensor; SiNx

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; HYDROGEN; INDIUM COMPOUNDS; OZONE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TEMPERATURE DISTRIBUTION; X RAY PHOTOELECTRON SPECTROSCOPY;

FREQUENCY SHIFTS; MAGNETRON SPUTTERER; SINX; SURFACE ACOUSTIC SENSORS (SAW);

CHEMICAL SENSORS;

EID: 33747817960     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.04.082     Document Type: Article

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