Annealing of Si surface region modified by plasma immersion implantation of nitrogen

Journal of Physics: Conference Series

Volumn 356, Issue 1, 2012, Pages

  Alexandrova, S ^a   Halova, E ^a   Szekeres, A ^b   Vlaikova, E ^b   Gartner, M ^c   Anastasescu, M ^c  

^a TECHNICAL UNIVERSITY OF SOFIA   (Bulgaria)

^b INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^c INSTITUTE OF PHYSICAL CHEMISTRY   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; EDUCATION; ELLIPSOMETRY; NANOTECHNOLOGY; NITROGEN; NITROGEN PLASMA; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS; SPECTROSCOPIC ELLIPSOMETRY; SPECTRUM ANALYSIS;

AFTER HIGH TEMPERATURE; DIFFUSION PROCESS; ELLIPSOMETRIC DATA; MOLECULAR NITROGEN; NANO-STRUCTURED; PLASMA IMMERSION IMPLANTATIONS; SI SURFACES; SI-N BONDS;

SILICON;

EID: 84860676204     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/356/1/012031     Document Type: Conference Paper

References (11)

1. del Prado A, San Andrés E, Martlnez F L, Mártil I, González-Díaz G, Bohne W, Röhrich J, Selle B and Fernández M 2002 Vacuum 67 507
2. Pan J S, Wee A T S, Huan C H A, Tan H S and Tan K L 1997 Appl. Surf. Sci. 115 166
3. Bachurin V I, Churilov A B, Potapov E V, Smirnov V K, Makarov V V and Danilin A B 1999 Nucl. Instrum. Meth. B 147 316-9
4. Jones R, Hahn I, Goss J P, Briddon P R and Oberg S 2004 Solid State Phenomena 95-96 93-8
5. Honda R Y, Mota R P, Batocki R G S, Santos D C R, Nicoleti T, Kostov K G, Kayama M E, Algatti M A, Cruz N C and Ruggiero L 2009 J. Phys.: Conf. Ser. 167 012055
6. Larijani M M and Haidari G 2010 World Appl. Sci. J. 8 972-9
7. Lange P, Schnakenberg U, Ullerich S and Schliwinski H-J 1990 J. Appl. Phys. 68 3532-7
8. Rui Y, Chen D, Xu J, Li W, Cen Zh, Huang X and Chen K 2007 Appl. Surf. Sci. 253 8647-51 (Pubitemid 47126619)
9. Kaneta C, Yamasaki T and Kosaka Y 2003 Fujitsu Sci. Technol. J. 39 106-18
10. Cigal J C 2002 A Novel Spectroscopic Ellipsometer in the Infrared Thesis Technische Universiteit Eindhoven The Netherlands
11. Korte E H and Roseler A 1998 Analyst April 123 647-51 (Pubitemid 28196124)