Effects of hydrogen plasma annealing on the luminescence from a-Si:H/SiO 2 and nc-Si/SiO 2 multilayers

Applied Surface Science

Volumn 253, Issue 21, 2007, Pages 8647-8651

  Rui, Yunjun ^a,b   Chen, Deyuan ^a   Xu, Jun ^a   Li, Wei ^a   Cen, Zhanhong ^a   Huang, Xinfan ^a   Chen, Kunji ^a  

^a NANJING UNIVERSITY   (China)

^b NANJING TECH UNIVERSITY   (China)

Author keywords

Nanostructures; Optical properties; Plasma annealing

Indexed keywords

LUMINESCENCE; PASSIVATION; PLASMA DIAGNOSTICS; SILICON COMPOUNDS;

ATOMIC MOBILITY; PLASMA ANNEALING; THERMAL ANNEALING;

MULTILAYERS;

EID: 34547212765     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.04.058     Document Type: Article

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