Plasma-polymerized hexamethyldisilazane treated by nitrogen plasma immersion ion implantation technique

Journal of Physics: Conference Series

Volumn 167, Issue , 2009, Pages

  Honda, R Y ^a   Mota, R P ^a   Batocki, R G S ^a   Santos, D C R ^a   Nicoleti, T ^a   Kostov, K G ^a   Kayama, M E ^a   Algatti, M A ^a   Cruz, N C ^a   Ruggiero, L ^a  

^a SÃO PAULO STATE UNIVERSITY UNESP   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 67651007840     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/167/1/012055     Document Type: Conference Paper

References (12)

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