A fully differential CMOS-MEMS DETF oxide resonator with Q > 4800 and positive TCF

IEEE Electron Device Letters

Volumn 33, Issue 5, 2012, Pages 721-723

  Chen, Wen Chien ^a   Li, Ming Huang ^a   Liu, Yu Chia ^a   Fang, Weileun ^a   Li, Sheng Shian ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

0.18 m CMOS Process; CMOS MEMS; Double ended tuning fork (DETF); Embedded electrode; Fully differential; Micromechanical resonators; Oxide structure

Indexed keywords

CMOS PROCESSS; CMOS-MEMS; EMBEDDED ELECTRODES; FULLY DIFFERENTIAL; OXIDE STRUCTURES; TUNING-FORK;

BANDPASS FILTERS; CMOS INTEGRATED CIRCUITS; LOW PASS FILTERS; MICROMECHANICAL RESONATORS; RESONATORS; WIRELESS TELECOMMUNICATION SYSTEMS;

DIFFERENTIAL AMPLIFIERS;

EID: 84860369462     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2012.2188774     Document Type: Article

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