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Volumn 100, Issue 17, 2012, Pages

High-Q silicon optomechanical microdisk resonators at gigahertz frequencies

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT AIR; DISK RESONATOR; GIGAHERTZ FREQUENCIES; MECHANICAL QUALITY FACTORS; MICRODISK RESONATORS; MODAL COUPLING; MODAL FREQUENCY; OPTICAL TRANSDUCTION; OPTOMECHANICAL; THERMAL MOTION; ULTRA-HIGH FREQUENCY BANDS; VIBRATIONAL MODES;

EID: 84860346183     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4709416     Document Type: Article
Times cited : (73)

References (22)
  • 15
    • 0000267361 scopus 로고
    • 10.1121/1.1908579
    • M. Onoe, J. Acoust. Soc. Am. 28, 1158 (1956). 10.1121/1.1908579
    • (1956) J. Acoust. Soc. Am. , vol.28 , pp. 1158
    • Onoe, M.1
  • 16
    • 10944271110 scopus 로고    scopus 로고
    • VHF single-crystal silicon elliptic bulk-mode capacitive disk resonators - Part I: Design and modeling
    • DOI 10.1109/JMEMS.2004.838387
    • Z. Hao, S. Pourkamali, and F. Ayazi, J. Microelectromech. Syst. 13, 1043 (2004). 10.1109/JMEMS.2004.838387 (Pubitemid 40015587)
    • (2004) Journal of Microelectromechanical Systems , vol.13 , Issue.6 , pp. 1043-1053
    • Hao, Z.1    Pourkamali, S.2    Ayazi, F.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.