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Applied Physics Letters

Volumn 97, Issue 7, 2010, Pages

High Q optomechanical resonators in silicon nitride nanophotonic circuits

(4) Fong, K Y a Pernice, W H P a Li, Mo a Tang, H X a

a YALE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FULLY INTEGRATED; IN-VACUUM; INTEGRATED PHOTONIC CIRCUIT; MECHANICAL MOTIONS; MECHANICAL SENSING; MICROMECHANICAL RESONATOR; NANOPHOTONIC CIRCUITS; ON CHIPS; OPTICAL COMPONENTS; OPTICAL FORCE; OPTOMECHANICAL; SILICON BULK MICROMACHINING;

MICROMACHINING; NANOPHOTONICS; RESONATORS;

SILICON NITRIDE;

EID: 77956029051 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3480411 Document Type: Article

Times cited : (54)

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