Waveguide-based phononic crystal micro/nanomechanical high-Q resonators

Journal of Microelectromechanical Systems

Volumn 21, Issue 2, 2012, Pages 379-384

  Mohammadi, Saeed ^a   Adibi, Ali ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electromechanical system; phononic band gap; phononic crystal (PnC); resonator; waveguide

Indexed keywords

BULK ACOUSTIC WAVE RESONATOR; ELECTRICAL SIGNAL; ELECTROMECHANICAL SYSTEMS; HIGH-Q RESONATORS; MECHANICAL SUPPORT; MOTIONAL RESISTANCE; PHONONIC BAND GAPS; PHONONIC CRYSTAL; SLAB WAVEGUIDES; SUPPORT LOSS; VERY HIGH FREQUENCY;

ALUMINUM NITRIDE; ARCHITECTURE; PHONONS; RESONATORS; WAVEGUIDES;

ELECTROMECHANICAL DEVICES;

EID: 84859700351     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2174426     Document Type: Article

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