Simultaneous high-Q confinement and selective direct piezoelectric excitation of flexural and extensional lateral vibrations in a silicon phononic crystal slab resonator

Sensors and Actuators, A: Physical

Volumn 167, Issue 2, 2011, Pages 524-530

  Mohammadi, Saeed ^a   Eftekhar, Ali A ^a   Pourabolghasem, Reza ^a   Adibi, Ali ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

MEMS; Micromechanical resonators; Phononic crystals; Piezoelectric film; Quality factor

Indexed keywords

ACOUSTIC MODE; AIR HOLES; EIGEN FREQUENCIES; ELASTIC VIBRATION; ELECTRICAL CHARACTERISTIC; FINITE ELEMENT ANALYSIS; FREQUENCY SWEEP; INPUT IMPEDANCE; LATERAL VIBRATIONS; MICROMECHANICAL RESONATORS; PHONONIC BAND GAPS; PHONONIC CRYSTAL; PIEZOELECTRIC EXCITATION; PIEZOELECTRIC FILM; QUALITY FACTOR; QUALITY FACTORS; RESONANCE FREQUENCIES; RESONANT STRUCTURES;

ACOUSTIC IMPEDANCE; CRYSTAL STRUCTURE; FABRICATION; PHONONS; PIEZOELECTRICITY; RESONANCE; TRANSDUCERS;

RESONATORS;

EID: 79955879705     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.03.014     Document Type: Article

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