Effect of iron catalyst thickness on vertically aligned carbon nanotube forest straightness for CNT-MEMS

Journal of Micromechanics and Microengineering

Volumn 22, Issue 5, 2012, Pages

  Moulton, Kellen ^a   Morrill, Nicholas B ^b   Konneker, Adam M ^b   Jensen, Brian D ^a   Vanfleet, Richard R ^b   Allred, David D ^b   Davis, Robert C ^b  

^a Brigham Young University   (United States)

^b Brigham Young University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES (CNTS); EDGE DEFINITION; IRON CATALYST; SEM IMAGE; SIDEWALL ROUGHNESS; VERTICALLY ALIGNED CARBON NANOTUBE; WELL-ALIGNED;

CARBON NANOTUBES; ELECTROMECHANICAL DEVICES; FORESTRY; MEMS;

CATALYSTS;

CARBON; CATALYSTS; FORESTRY; GROWTH; IRON;

EID: 84859237988     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/5/055004     Document Type: Article

References (23)

1. Hutchison D N, Morrill N B, Aten Q, Turner B W, Jensen B D, Howell L L, Vanfleet R R and Davis R C 2010 Carbon nanotubes as a framework for high-aspect-ratio MEMS fabrication J. Microelectromech. Syst. 19 7582
2. Hutchison D N, Aten Q, Turner B, Morrill N, Howell L L, Jensen B D, Davis R C and Vanfleet R R 2009 High aspect ratio microelectromechanical systems: a versatile approach using carbon nanotubes as a framework Proc. Int. Solid-State Sensors, Actuators and Microsystems Conf. (Piscataway, NJ: IEEE) pp 16047
3. Song J, Jensen D S, Hutchison D N, Turner B, Wood T, Dadson A, Vail M A, Linford M R, Vanfleet R R and Davis R C 2011 Carbon-nanotube-templated microfabrication of porous silicon-carbon materials with application to chemical separations Adv. Funct. Mater. 21 11329
4. Ehrfeld W et al 1987 Fabrication of microstructures using the LIGA process Proc. Micro Robots and Teleoperators Workshop (Hyannis, MA, USA,)
5. Ehrfeld W, Gotz F, Munchmeyer D, Schelb W and Schmidt D 1988 Liga process sensor construction techniques via x-ray lithography IEEE Solid-State Sensor and Actuator Workshop pp 14
6. Jose-Yacaman M, Miki-Yoshida M, Rendon L and Santiesteban J G 1993 Catalytic growth of carbon microtubules with fullerene structure Appl. Phys. Lett. 62 6579
7. Sinnott S B, Andrews R, Qian D, Rao A M, Mao Z, Dickey E C and Derbyshire F 1999 Model of carbon nanotube growth through chemical vapor deposition Chem. Phys. Lett. 315 2530 (Pubitemid 129549518)
8. Fan S, Chapline M G, Franklin N R, Tombler T W, Cassell A M and Dai H 1999 Self-oriented regular arrays of carbon nanotubes and their field emission properties Science 283 512
9. Lee C J, Park J and Yu J A 2002 Catalyst effect on carbon nanotubes synthesized by thermal chemical vapor deposition Chem. Phys. Lett. 360 2505
10. Bronikowski M J 2006 CVD growth of carbon nanotube bundle arrays Carbon 44 282232 (Pubitemid 44279615)
11. Jeong G-H, Olofsson N, Falk L K L and Campbell E E B 2009 Effect of catalyst pattern geometry on the growth of vertically aligned carbon nanotube arrays Carbon 47 696704
12. Cheung C L, Kurtz A, Park H and Lieber C M 2002 Diameter-controlled synthesis of carbon nanotubes J. Phys. Chem. B 106 242933 (Pubitemid 35275918)
13. Zhao B, Futaba D N, Yasuda S, Akoshima M, Yamada T and Hata K 2008 Exploring advantages of diverse carbon nanotube forests with tailored structures synthesized by supergrowth from engineered catalysts ACS Nano 3 10814
14. Chiang W-H, Futaba D N, Yumura M and Hata K 2011 Growth control of single-walled, double-walled, and triple-walled carbon nanotube forests by a priori electrical resistance measurement of catalyst films Carbon 49 436875
15. Gohier A, Ewels C P, Minea T M and Djouadi M A 2008 Carbon nanotube growth mechanism switches from tip-to base-growth with decreasing catalyst particle size Carbon 46 13318
16. Patole S P, Alegaonkar P S, Shin H C and Yoo J B 2008 Alignment and wall control of ultra long carbon nanotubes in water assisted chemical vapour deposition J. Phys. D: Appl. Phys. 41 155311
17. Yao Z, Postma H W C, Balents L and Dekker C 1999 Carbon nanotube intramolecular junctions Nature 402 2736 (Pubitemid 129516258)
18. Zhou L G and Shi S-Q 2003 Formation energy of stone-wales defects in carbon nanotubes Appl. Phys. Lett. 83 12224
19. Mori K, Osakada K and Yamaguchi H 1993 Prediction of curvature of an extruded bar with noncircular cross-section by a 3-D rigid-plastic finite element method Int. J. Mech. Sci. 35 87987
20. Dai H 2001 Nanotube Growth and Characterization vol 80 (Berlin: Springer) (Topics in Applied Physics)
21. Nessim G D, Seita M, PLata D L, OBrien K P, Hart A J, Meshot E R, Reddy C M, Gschwend P M and Thompson C V 2011 Precursor gas chemistry determines the crystalinity of carbon nanotubes synthesized at low temperature Carbon 49 80410
22. Lott C D, McLain T W, Harb J and Howell L L 2002 Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator Sensors Actuators A 101 23950
23. Wittwer J W, Baker M S and Howell L L 2006 Simulation, measurement, and asymmetric buckling of thermal microactuators Sensors Actuators A 128 395401