High aspect ratio microelectromechanical systems: A versatile approach using carbon nanotubes as a framework

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1604-1607

  Hutchison, D N ^a   Aten, Q ^a   Turner, B ^a   Morrill, N ^a   Howell, L L ^a   Jensen, B D ^a   Davis, R C ^a   Vanfleet, R R ^a  

^a BRIGHAM YOUNG UNIVERSITY   (United States)

Author keywords

Chemical vapor infiltration; Comb actuators; High aspect ratio; Vertically aligned carbon nanotubes

Indexed keywords

COMB ACTUATOR; FABRICATION PROCESS; FILLING MATERIALS; HIGH ASPECT RATIO; MICRO ELECTRO MECHANICAL SYSTEM; MICROSCALE STRUCTURES; NANOTUBE STRUCTURE; SOLID STRUCTURES; TEMPLATED; TEMPLATING; THREE-DIMENSIONAL PATTERNS; VERTICALLY ALIGNED CARBON NANOTUBE; VERTICALLY ALIGNED CARBON NANOTUBES;

ACTUATORS; ASPECT RATIO; CHEMICAL VAPOR DEPOSITION; CHEMICAL VAPOR INFILTRATION; ELECTROSTATIC ACTUATORS; FABRICATION; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PHOTORESISTS; PIEZOELECTRIC TRANSDUCERS; PRESSURE DROP; SEEPAGE; SILICON NITRIDE; SOIL MECHANICS; SOLID-STATE SENSORS; VAPORS;

CARBON NANOTUBES;

ACTUATORS; ASSEMBLY; CARBON; DEPOSITION; INFILTRATION; PRESSURE GRADIENT; SEEPAGE; VAPORS;

EID: 71449084065     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285766     Document Type: Conference Paper

References (4)

1. Malek CK, Saile V, "Applications of LIGA technology to precision manufacturing of high-aspect-ratio microcomponents and -systems: a review", Microelectronics Journal 35 (2), 131-143 (2004).
2. D. Hutchison, N. Morrill, Q. Aten, B. Turner, B. Jensen, L. Howell, R. Vanfleet, R. Davis, "High Aspect Ratio Patterned Nanocomposites Fabricated by Carbon Nanotube Templating", In Review
3. C. D. Lott, T. W. McLain, J. Harb, and L. L. Howell, "Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator," Sensors and Actuators, A: Physical, vol. 101, pp. 239-250, 2002.
4. B. D. Jensen, M. B. Parkinson, K. Kurabayashi, L. L. Howell, and M. S. Baker, "Design optimization of a fully-compliant bistable micro-mechanism," in Microelectromechanical Systems (MEMS), 2001 ASME Int. Mechanical Engineering Congress and Exposition, 2001.