Influence of rapid thermal annealing on surface texture-etched Al-doped ZnO films prepared by various magnetron sputtering methods

Thin Solid Films

Volumn 520, Issue 10, 2012, Pages 3803-3807

  Minami, Tadatsugu ^a   Hirano, Tomoyasu ^a   Miyata, Toshihiro ^a   Nomoto, Jun Ichi ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

AZO; Haze; Magnetron sputtering; Solar cell; Thin film; Thin film solar cell; Transparent electrode; ZnO

Indexed keywords

AZO; HAZE; THIN-FILM SOLAR CELLS; TRANSPARENT ELECTRODE; ZNO;

ALUMINUM; DC POWER TRANSMISSION; MAGNETRON SPUTTERING; OPTICAL FILMS; RAPID THERMAL ANNEALING; SOLAR CELLS; TEXTURES; THIN FILMS; WET ETCHING; ZINC OXIDE;

FILM PREPARATION;

EID: 84858342195     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.10.067     Document Type: Conference Paper

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