Fabrication and fundamental characterizations of tiled clones of single-crystal diamond with 1-inch size

Diamond and Related Materials

Volumn 24, Issue , 2012, Pages 29-33

  Yamada, Hideaki ^a   Chayahara, Akiyoshi ^a   Umezawa, Hitoshi ^a   Tsubouchi, Nobuteru ^a   Mokuno, Yoshiaki ^a   Shikata, Shinichi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Crystal growth; Ion beam implantation; Large wafer; Single crystal diamond

Indexed keywords

ABNORMAL GROWTH; CROSS SECTION; ION BEAM IMPLANTATION; LARGE WAFER; SINGLE-CRYSTAL DIAMOND; X RAY ROCKING CURVE;

CRYSTAL GROWTH; SUBSTRATES; X RAY DIFFRACTION;

CLONING;

EID: 84858335948     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2011.09.007     Document Type: Article

References (24)

1. H. Umezawa, Y. Mokuno, and H. Yamada Diamond Relat. Mater. 19 2010 208
2. T. Funaki, K. Kodama, and H. Umezawa Mater. Sci. Forum 679-680 2011 820
3. J.W. Palmour The 8th ECSCRM, Oslo, Norway Aug. 29 - Sep. 2, 2010
4. C. Wild, R. Kohl, and N. Herres Diamond Relat. Mater. 3 1994 373
5. K. Meguro, Y. Ando, and Y. Nishibayashi New Diamond Front. Carbon Technol. 12 2002 125
6. F. Silva, J. Achard, and O. Brinza Diamond Relat. Mater. 18 2009 683
7. Y. Mokuno, A. Chayahara, and H. Yamada Diamond Relat. Mater. 18 2009 1258
8. Y. Mokuno, A. Chayahara, and Y. Soda Diamond Relat. Mater. 15 2006 455
9. C.S. Yan, Y.K. Vohra, and H.K. Mao Proc. Natl. Acad. Sci. U. S. A. 99 2002 12523
10. M.W. Geis, H.I. Smith, and A. Argoitia Appl. Phys. Lett. 58 1991 2485
11. M.W. Geis, N.N. Efremow, and R. Susalka Diamond Relat. Mater. 4 1994 76
12. J.B. Posthill, D.P. Malta, and G.C. Hudson Thin Solid Films 271 1995 39
13. G. Janssen, and L.J. Giling Diamond Relat. Mater. 4 1995 1025
14. J.J. Schermer, F.K. de Theije, and L.J. Giling J. Cryst. Growth 165 1996 387 401
15. C.F.-. Dufour, and A. Gicquel Thin Solid Films 308-309 1997 178 185
16. C.F.-. Dufour, A. Gicquel, and R. Chiron Diamond Relat. Mater. 7 1998 986 998
17. K. Meguro, Y. Nishibayashi, and T. Imai SEI Tech. Rev. 163 2003 53 59 (in Japanese)
18. K. Kobashi, Y. Nishibayashi, and Y. Yokoya Diamond Relat. Mater. 12 2003 233 240
19. H. Yamada, A. Chayahara, and Y. Mokuno Appl. Phys. Express 3 2010 051301
20. H. Yamada, A. Chayahara, and Y. Mokuno Diamond Relat. Mater. 20 2011 616
21. A. Chayahara, Y. Mokuno, and Y. Horino Diamond Relat. Mater. 13 2004 1954
22. H. Yamada, Y. Mokuno, and A. Chayahara Diamond Relat. Mater. 16 2007 576
23. A. Samoto, S. Ito, A. Hotta, and T. Hasebe Diamond Relat. Mater. 17 2008 1039
24. R. Linares, and P. Doering Diamond Relat. Mater. 8 1999 909