Improving purity and size of single-crystal diamond plates produced by high-rate CVD growth and lift-off process using ion implantation

Diamond and Related Materials

Volumn 18, Issue 10, 2009, Pages 1258-1261

  Mokuno, Y ^a   Chayahara, A ^a   Yamada, H ^a   Tsubouchi, N ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Diamond; Freestanding plate; High rate growth; Ion implantation; Lift off; Microwave plasma CVD

Indexed keywords

CVD DIAMOND; FREESTANDING PLATE; GROWTH CONDITIONS; HIGH DENSITY PLASMAS; HIGH PURITY; HIGH RATE; HIGH TEMPERATURE; HIGH-RATE GROWTH; LIFT-OFF PROCESS; MICROWAVE PLASMA CVD; NITROGEN ADDITIONS; NITROGEN-DOPED; SEED CRYSTAL; SINGLE CRYSTAL DIAMOND; SINGLE-CRYSTAL; SURFACE GROWTH; TRANSMISSION SPECTRUMS; UV-VIS-NIR;

DIAMONDS; EPITAXIAL GROWTH; ION BOMBARDMENT; ION IMPLANTATION; MICROWAVES; PLASMAS; SYNTHETIC DIAMONDS;

CHEMICAL VAPOR DEPOSITION;

EID: 68749095060     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2009.04.005     Document Type: Article

References (17)

1. Yan C.S., Vohra Y.K., Mao H.K., and Hemley R.J. Proc. Natl. Acad. Sci. U. S. A. 99 (2002) 12523
2. Chayahara A., Mokuno Y., Horino Y., Takasu Y., Kato H., and Fujimori N. Diamond Relat. Mater. 13 (2004) 1954
3. Mokuno Y., Chayahara A., Soda Y., Horino Y., and Fujimori N. Diamond Relat. Mater. 14 (2005) 1743
4. Ho S.S., Yan C.S., Liu Z., Mao H.K., and Hemley R.J. Ind. Diamond Rev. 66 (2006) 28
5. Tallaire A., Achard J., Silva F., Sussmann R.S., and Gicquel A. Diamond Relat. Mater. 14 (2005) 249
6. Bogdan G., Nesládek M., D'Haen J., Maes J., Moshchalkov V.V., Haenen K., and D'Olieslaeger M. Phys. Stat. Sol. (A) 202 (2005) 2066
7. Tranchant N., Tromson D., Remes Z., Rocha L., Nesladek M., and Bergonzo P. Mater. Res. Soc. Sym. Proc. 956 (2007) 177
8. Imai T., Saito H., Meguro K., Matsuura T., Yamamoto Y., Nishibayashi Y., and Tsuno T. Proceedings of Applied Diamond Conference / Frontier Carbon Technology Joint Conference vol. 1999 (1999) 71
9. Parikh N.R., Hunn J.D., McGucken E., Swanson M.L., White C.W., Rudder R.A., Malta D.P., Posthill J.B., and Markunas R.J. Appl. Phys. Lett. 61 (1992) 3124
10. Tzeng Y., Wei J., Woo J.T., and Lanford W. Appl. Phys. Lett 63 (1993) 2216
11. Marchywka M., Pehrsson P.E., Vestyck Jr. D.J., and Moses D. Appl. Phys. Lett. 63 (1993) 3521
12. Mokuno Y., Chayahara A., and Yamada H. Diamond Relat. Mater. 17 (2008) 415
13. Wild C., Kohl R., Herres N., Müller-Sebert W., and Koidl P. Diamond Relat. Mater. 3 (1994) 373
14. Achard J., Tallaire A., Sussmann R., Silva F., and Gicquel A. J. Cryst. Growth 284 (2005) 396
15. Achard J., Silva F., Brinza O., Tallaire A., and Gicquel A. Diamond Relat. Mater. 16 (2007) 685
16. Mokuno Y., Chayahara A., Soda Y., Yamada H., Horino Y., and Fujimori N. Diamond Relat. Mater. 15 (2006) 455-459
17. F. Silva, J. Achard, O. Brinza, X. Bonnin, K. Hassouni, A. Anthonis, K. De Corte, J. Barjon, Diamond Relat. Mater., Available online (doi:10.1016/j.diamond.2009.01.038).