|
Volumn 12, Issue 3-7, 2003, Pages 233-240
|
RandD of diamond films in the Frontier Carbon Technology Project and related topics
a a a a b b b b c c a a a d d d d e e f more..
b
KOBE STEEL LTD
(Japan)
|
Author keywords
Chemical vapor deposition; Diamond films; Etching; Field emission
|
Indexed keywords
CARBON;
CHEMICAL REACTORS;
CHEMICAL VAPOR DEPOSITION;
CRYSTAL DEFECTS;
CRYSTALS;
FILM GROWTH;
MORPHOLOGY;
CHEMICAL VAPOR DEPOSITION (CVD) REACTORS;
DIAMOND FILMS;
DIAMOND;
|
EID: 0037562918
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(02)00298-4 Document Type: Article |
Times cited : (33)
|
References (15)
|