Preparation of Ba-Ti-O films by laser chemical vapor deposition

Materials Chemistry and Physics

Volumn 133, Issue 1, 2012, Pages 398-404

  Ito, Akihiko ^a   Guo, Dongyun ^a   Tu, Rong ^a   Goto, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

A. Ceramics; A. Inorganic compound; B. Chemical vapor deposition; D. Microstructure

Indexed keywords

A. CERAMICS; CHEMICAL VAPOR; COLUMNAR GRAIN; LASER CHEMICAL VAPOR DEPOSITION; MOLAR RATIO; SI SUBSTRATES; TIO;

BARIUM; BARIUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; INORGANIC COMPOUNDS; MICROSTRUCTURE; PLATINUM;

FILM PREPARATION;

EID: 84857789104     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2012.01.048     Document Type: Article

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