High speed deposition of y 2O 3 films by laser-assisted chemical vapor deposition

Materials Transactions

Volumn 46, Issue 9, 2005, Pages 2114-2116

  Banal, Ryan ^a,b   Kimura, Teiichi ^a   Goto, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Cauliflower like microstructure; Deposition rate; Laser chemical vapor deposition; Y(dpm) 3; Y 2O 3 film

Indexed keywords

CAULIFLOWERLIKE MICROSTRUCTURE; LASER CHEMICAL VAPOR DEPOSITION; Y(DPM)3; Y2O3 FILMS;

CHEMICAL VAPOR DEPOSITION; LASER APPLICATIONS; MICROSTRUCTURE; PLANTS (BOTANY);

YTTRIUM COMPOUNDS;

EID: 27744524838     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.46.2114     Document Type: Article

References (9)

1. R. N. Sharma, S. T. Lakshmikumar and A. C. Rastogi: Thin Solid Films 199 (1991) 1-8.
2. N. Imaishi, T. Sato, M. Kimura and Y. Akiyama: J. Cryst. Growth 180 (1997) 680-690.
3. V. V. Bakovets, T. M. Levashova, V. T. Ratushnyak and L. F. Bakhturova: Inorg. Mater. 38 (2002) 371-373.
4. Y. Akiyama, T. Sato and I. Nobuyuki: J. Cryst. Growth 147 (1995) 130-146.
5. S. Shanmugham, M. Hendrick, N. Richards and M. Oljaca: J. Mater. Sci. 39 (2004) 377-381.
6. T. Kimura and T. Goto: Mater. Trans. 44 (2003) 421-424.
7. E. Sipp, F. Langlais and R. Naslain: J. Alloys Compd. 186 (1992) 77-87.
8. K. Brennfleck, E. Fitzer and G. Schoch: Euro CVD Five, Proceedings of the Fifth European Conf. on CVD (1985) 63-70.
9. M. Pulver, M. Nemetz and G. Wahl: Surf. Coat. Technol. 125 (2000) 400-406.