Texture and orientation characteristics of α-Al2O3 films prepared by laser chemical vapor deposition using Nd:YAG laser

Journal of Alloys and Compounds

Volumn 489, Issue 2, 2010, Pages 469-474

  Ito, Akihiko ^a   Kadokura, Hokuto ^a   Kimura, Teiichi ^a   Goto, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Alumina; Coating; Laser CVD; Microstructure; Orientation

Indexed keywords

ALUMINA COATING; CHAMBER PRESSURE; DEPOSITION TEMPERATURES; HIGH-T; LASER CHEMICAL VAPOR DEPOSITION; LASER CVD; LASER POWER; ND : YAG LASERS; PRECURSOR VAPORIZATION; RECTANGULAR PLATES;

ALUMINUM; CHEMICAL VAPOR DEPOSITION; COATINGS; FILM PREPARATION; LASERS; SOIL CONSERVATION; TEXTURES;

NEODYMIUM LASERS;

EID: 70649084988     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2009.09.088     Document Type: Article

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