Preparation and dielectric properties of polycrystalline films with dense nano-structured BaTiO3 by chemical vapor deposition using inductively coupled plasma

Vacuum

Volumn 80, Issue 6, 2006, Pages 519-529

  Suzuki, Keigo ^a   Kijima, Kazunori ^b  

^a MURATA MANUFACTURING CO LTD   (Japan)

^b KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Barium titanate; CVD; Dielectric property; Inductively coupled plasma; Nanoparticles

Indexed keywords

BARIUM TITANATE; CHEMICAL VAPOR DEPOSITION; DIELECTRIC PROPERTIES; INDUCTIVELY COUPLED PLASMA; NANOSTRUCTURED MATERIALS; PEROVSKITE;

MULTILAYER CAPACITORS; NANOPARTICLES; SI SUBSTRATES; SUBSTRATE TEMPERATURES;

POLYCRYSTALLINE MATERIALS;

EID: 32844466992     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.08.025     Document Type: Article

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