Measurement of the across-plane conductivity of YSZ thin films on silicon

Solid State Ionics

Volumn 211, Issue , 2012, Pages 58-64

  Navickas, E ^a,b   Gerstl, M ^a   Friedbacher, G ^a   Kubel, F ^a   Fleig, J ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Dielectric interlayer; Ionic conductivity; Microelectrodes; Pulsed laser deposition; YSZ thin films

Indexed keywords

CONDUCTIVITY MEASUREMENTS; DIELECTRIC INTERLAYERS; IMPEDANCE SPECTROSCOPY; ION-CONDUCTING; LAYER THICKNESS; RELAXATION FREQUENCY; SILICA INTERLAYERS; SILICON SUBSTRATES; YSZ THIN FILMS;

ELECTRIC CONDUCTIVITY MEASUREMENT; IONIC CONDUCTIVITY; MICROELECTRODES; PULSED LASER DEPOSITION; SILICA;

THIN FILMS;

EID: 84857784169     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssi.2012.01.007     Document Type: Article

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