Development of a silicon-based yttria-stabilized-zirconia (YSZ), amperometric oxygen sensor

Sensors and Actuators, B: Chemical

Volumn 85, Issue 3, 2002, Pages 212-218

  Yu, Shubin ^a   Wu, Qinghai ^a   Tabib Azar, Massood ^b   Liu, Chung Chiun ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

^b Case Western Reserve University   (United States)

Author keywords

Amperometric oxygen sensor; Microfabrication; YSZ layer

Indexed keywords

AMPEROMETRIC SENSORS; ANNEALING; ELECTRIC RESISTANCE; ELECTRODES; SILICON; THERMAL EFFECTS; THERMODYNAMIC STABILITY; ZIRCONIA;

CROSS-BRIDGE STRUCTURES; THERMAL SHOCKS;

OXYGEN SENSORS;

EID: 0037173588     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(02)00110-7     Document Type: Article

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10. Gas polarographic oxygen sensor using an oxygen/zirconia electrolyte