Interface nature of oxidized single-crystal arrays of etched Si nanowires on (100)Si

Applied Physics Letters

Volumn 100, Issue 8, 2012, Pages

  Jivanescu, M ^a   Stesmans, A ^a   Kurstjens, R ^b   Dross, F ^b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CROSS-SECTIONAL SHAPE; ELECTRICAL QUALITY; INTERFACE QUALITY; INTERFACE STRAIN; LOW TEMPERATURES; NANOPILLAR; SI NANOWIRE; SINGLE-CRYSTALLINE; THERMAL OXIDATION; TOPDOWN;

DEFECTS; NANOWIRES;

SILICON;

EID: 84857772292     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3682315     Document Type: Article

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