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Volumn 100, Issue 5, 2012, Pages

Self-driving capacitive cantilevers for high-frequency atomic force microscopy

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPE CANTILEVERS; CAPACITIVE CANTILEVERS; DRIVE VOLTAGE; DRIVING SYSTEMS; HIGH FREQUENCY; HIGH FREQUENCY HF; MECHANICAL RESONANCE; TAPPING MODES; THIN-FILM CAPACITORS; VIBRATION AMPLITUDE; VIBRATIONAL MODES;

EID: 84857016992     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3679684     Document Type: Article
Times cited : (9)

References (28)
  • 1
    • 52449097511 scopus 로고    scopus 로고
    • in American Control Conference (IEEE, Seattle, WA), 10.1109/ACC.2008. 4586983
    • K. K. Leang and A. J. Fleming, in American Control Conference (IEEE, Seattle, WA, 2008), pp. 3188-3193. 10.1109/ACC.2008.4586983
    • (2008) , pp. 3188-3193
    • Leang, K.K.1    Fleming, A.J.2
  • 2
    • 2942602100 scopus 로고    scopus 로고
    • 10.1126/science.1067410
    • J. K. H. Hörber and M. J. Miles, Science 302, 1002 (2003). 10.1126/science.1067410
    • (2003) Science , vol.302 , pp. 1002
    • Hörber, J.K.H.1    Miles, M.J.2
  • 17
    • 84857007063 scopus 로고    scopus 로고
    • Mechanical strain in the capacitor is found by treating the cantilever as a uniform isotropic Euler-Bernoulli beam and including Poisson's effect. The films that make uthe capacitor are thin and do not affect the mechanics. The mechanical strain in the capacitor is assumed to be constant and equal to the strain on the surface of the cantilever.
    • Mechanical strain in the capacitor is found by treating the cantilever as a uniform isotropic Euler-Bernoulli beam and including Poisson's effect. The films that make up the capacitor are thin and do not affect the mechanics. The mechanical strain in the capacitor is assumed to be constant and equal to the strain on the surface of the cantilever.
  • 21
    • 55249106166 scopus 로고    scopus 로고
    • 10.1063/1.3000055
    • G. Hähner, J. Appl. Phys. 104, 084902 (2008). 10.1063/1.3000055
    • (2008) J. Appl. Phys. , vol.104 , pp. 084902
    • Hähner, G.1
  • 25
    • 84857005783 scopus 로고    scopus 로고
    • To fit the amplitude noise spectra, the noise floor is attenuated to the 1-10 kHz level to remove high-frequency attenuation in the electronics. This leads to a 10 correction at 250 kHz and a 50 correction at 1.5 MHz.
    • To fit the amplitude noise spectra, the noise floor is attenuated to the 1-10 kHz level to remove high-frequency attenuation in the electronics. This leads to a 10 correction at 250 kHz and a 50 correction at 1.5 MHz.
  • 28
    • 0004106824 scopus 로고
    • 3rd ed. (Addison-Wesley, Upper Saddle River, NJ).
    • S. S. Rao, Mechanical Vibrations, 3rd ed. (Addison-Wesley, Upper Saddle River, NJ, 1995).
    • (1995) Mechanical Vibrations
    • Rao, S.S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.