-
1
-
-
52449097511
-
-
in American Control Conference (IEEE, Seattle, WA), 10.1109/ACC.2008. 4586983
-
K. K. Leang and A. J. Fleming, in American Control Conference (IEEE, Seattle, WA, 2008), pp. 3188-3193. 10.1109/ACC.2008.4586983
-
(2008)
, pp. 3188-3193
-
-
Leang, K.K.1
Fleming, A.J.2
-
2
-
-
2942602100
-
-
10.1126/science.1067410
-
J. K. H. Hörber and M. J. Miles, Science 302, 1002 (2003). 10.1126/science.1067410
-
(2003)
Science
, vol.302
, pp. 1002
-
-
Hörber, J.K.H.1
Miles, M.J.2
-
3
-
-
33749339997
-
-
10.1038/sj.emboj.7601326
-
M. Yokokawa, C. Wada, T. Ando, N. Sakai, A. Yagi, S. H. Yoshimura, and K. Takeyasu, EMBO J. 25, 4567 (2006). 10.1038/sj.emboj.7601326
-
(2006)
EMBO J.
, vol.25
, pp. 4567
-
-
Yokokawa, M.1
Wada, C.2
Ando, T.3
Sakai, N.4
Yagi, A.5
Yoshimura, S.H.6
Takeyasu, K.7
-
4
-
-
27344437046
-
-
10.1088/0957-0233/16/11/006
-
D. C. Hurley, M. Kopycinska-Müller, A. B. Kos, and R. H. Geiss, Meas. Sci. Technol. 16, 2167 (2005). 10.1088/0957-0233/16/11/006
-
(2005)
Meas. Sci. Technol.
, vol.16
, pp. 2167
-
-
Hurley, D.C.1
Kopycinska-Müller, M.2
Kos, A.B.3
Geiss, R.H.4
-
7
-
-
46449124222
-
-
(IEEE, New York, NY), 10.1109/ACC.2007.4282300
-
D. Y. Abramovitch, S. B. Andersson, L. Y. Pao, and G. Schitter, in American Control Conference (IEEE, New York, NY, 2007), pp. 3488-3502. 10.1109/ACC.2007.4282300
-
(2007)
American Control Conference
, pp. 3488-3502
-
-
Abramovitch, D.Y.1
Andersson, S.B.2
Pao, L.Y.3
Schitter, G.4
-
8
-
-
33846787059
-
-
10.1088/0957-4484/18/4/044008
-
U. Rabe, S. Hirsenkorn, M. Reinstädtler, T. Sulzbach, C. Lehrer, and W. Arnold, Nanotechnology 18, 044008 (2007). 10.1088/0957-4484/18/4/044008
-
(2007)
Nanotechnology
, vol.18
, pp. 044008
-
-
Rabe, U.1
Hirsenkorn, S.2
Reinstädtler, M.3
Sulzbach, T.4
Lehrer, C.5
Arnold, W.6
-
9
-
-
34548457759
-
-
10.1063/1.2766825
-
H. Yamashita, N. Kodera, A. Miyagi, T. Uchihashi, D. Yamamoto, and T. Ando, Rev. Sci. Instrum. 78, 083702 (2007). 10.1063/1.2766825
-
(2007)
Rev. Sci. Instrum.
, vol.78
, pp. 083702
-
-
Yamashita, H.1
Kodera, N.2
Miyagi, A.3
Uchihashi, T.4
Yamamoto, D.5
Ando, T.6
-
10
-
-
77953524190
-
-
10.1143/APEX.3.065205
-
K. I. Umeda, N. Oyabu, K. Kobayashi, Y. Hirata, K. Matsushige, and H. Yamada, Appl. Phys. Express 3, 065205 (2010). 10.1143/APEX.3.065205
-
(2010)
Appl. Phys. Express
, vol.3
, pp. 065205
-
-
Umeda, K.I.1
Oyabu, N.2
Kobayashi, K.3
Hirata, Y.4
Matsushige, K.5
Yamada, H.6
-
12
-
-
43349107886
-
-
10.1063/1.2911916
-
K. Schwarz, U. Rabe, S. Hirsekorn, and W. Arnold, Appl. Phys. Lett. 92, 183105 (2008). 10.1063/1.2911916
-
(2008)
Appl. Phys. Lett.
, vol.92
, pp. 183105
-
-
Schwarz, K.1
Rabe, U.2
Hirsekorn, S.3
Arnold, W.4
-
13
-
-
66749093484
-
-
10.1063/1.3133333
-
S. S. Chou, Y. Y. Kim, A. Srivastava, B. Murphy, O. Balogun, S.-H. Tark, G. Shekhawat, and V. P. Dravid, Appl. Phys. Lett. 94, 224103 (2009). 10.1063/1.3133333
-
(2009)
Appl. Phys. Lett.
, vol.94
, pp. 224103
-
-
Chou, S.S.1
Kim, Y.Y.2
Srivastava, A.3
Murphy, B.4
Balogun, O.5
Tark, S.-H.6
Shekhawat, G.7
Dravid, V.P.8
-
14
-
-
33751506293
-
-
10.1063/1.1141354
-
G. Neubauer, S. R. Cohen, G. M. McClelland, D. Horne, and C. M. Mate, Rev. Sci. Instrum. 61, 2296 (1990). 10.1063/1.1141354
-
(1990)
Rev. Sci. Instrum.
, vol.61
, pp. 2296
-
-
Neubauer, G.1
Cohen, S.R.2
McClelland, G.M.3
Horne, D.4
Mate, C.M.5
-
15
-
-
0028425853
-
-
10.1016/0924-4247(93)00701-5
-
J. Brugger, N. Blanc, Ph. Renaud, and N. F. de Rooij, Sens. Actuators, A 43, 339 (1994). 10.1016/0924-4247(93)00701-5
-
(1994)
Sens. Actuators, A
, vol.43
, pp. 339
-
-
Brugger, J.1
Blanc, N.2
Renaud, Ph.3
De Rooij, N.F.4
-
16
-
-
0024960332
-
-
10.1016/0250-6874(89)80083-6
-
S. Bouwstra, F. R. Blom, T. S. J. Lammerink, H. Yntema, P. Schrap, J. H. J. Fluitman, and M. Elwenspoek, Sens. Actuators 17, 219 (1989). 10.1016/0250-6874(89)80083-6
-
(1989)
Sens. Actuators
, vol.17
, pp. 219
-
-
Bouwstra, S.1
Blom, F.R.2
Lammerink, T.S.J.3
Yntema, H.4
Schrap, P.5
Fluitman, J.H.J.6
Elwenspoek, M.7
-
17
-
-
84857007063
-
-
Mechanical strain in the capacitor is found by treating the cantilever as a uniform isotropic Euler-Bernoulli beam and including Poisson's effect. The films that make uthe capacitor are thin and do not affect the mechanics. The mechanical strain in the capacitor is assumed to be constant and equal to the strain on the surface of the cantilever.
-
Mechanical strain in the capacitor is found by treating the cantilever as a uniform isotropic Euler-Bernoulli beam and including Poisson's effect. The films that make up the capacitor are thin and do not affect the mechanics. The mechanical strain in the capacitor is assumed to be constant and equal to the strain on the surface of the cantilever.
-
-
-
-
21
-
-
55249106166
-
-
10.1063/1.3000055
-
G. Hähner, J. Appl. Phys. 104, 084902 (2008). 10.1063/1.3000055
-
(2008)
J. Appl. Phys.
, vol.104
, pp. 084902
-
-
Hähner, G.1
-
24
-
-
18744405727
-
-
10.1063/1.1896938
-
T. Fukuma, M. Kimura, K. Kobayashi, K. Matsushige, and H. Yamada, Rev. Sci. Instrum. 76, 053704 (2005). 10.1063/1.1896938
-
(2005)
Rev. Sci. Instrum.
, vol.76
, pp. 053704
-
-
Fukuma, T.1
Kimura, M.2
Kobayashi, K.3
Matsushige, K.4
Yamada, H.5
-
25
-
-
84857005783
-
-
To fit the amplitude noise spectra, the noise floor is attenuated to the 1-10 kHz level to remove high-frequency attenuation in the electronics. This leads to a 10 correction at 250 kHz and a 50 correction at 1.5 MHz.
-
To fit the amplitude noise spectra, the noise floor is attenuated to the 1-10 kHz level to remove high-frequency attenuation in the electronics. This leads to a 10 correction at 250 kHz and a 50 correction at 1.5 MHz.
-
-
-
-
26
-
-
34548412617
-
-
10.1063/1.2778762
-
B. J. Rodriguez, S. Jesse, K. Seal, A. P. Baddorf, S. V. Kalinin, and P. D. Rack, Appl. Phys. Lett. 91, 093130 (2007). 10.1063/1.2778762
-
(2007)
Appl. Phys. Lett.
, vol.91
, pp. 093130
-
-
Rodriguez, B.J.1
Jesse, S.2
Seal, K.3
Baddorf, A.P.4
Kalinin, S.V.5
Rack, P.D.6
-
27
-
-
0005064725
-
-
10.1063/1.122112
-
R. G. Beck, M. A. Eriksson, M. A. Topinka, R. M. Westervelt, K. D. Maranowski, and A. C. Gossard, Appl. Phys. Lett. 73, 1149 (1998). 10.1063/1.122112
-
(1998)
Appl. Phys. Lett.
, vol.73
, pp. 1149
-
-
Beck, R.G.1
Eriksson, M.A.2
Topinka, M.A.3
Westervelt, R.M.4
Maranowski, K.D.5
Gossard, A.C.6
-
28
-
-
0004106824
-
-
3rd ed. (Addison-Wesley, Upper Saddle River, NJ).
-
S. S. Rao, Mechanical Vibrations, 3rd ed. (Addison-Wesley, Upper Saddle River, NJ, 1995).
-
(1995)
Mechanical Vibrations
-
-
Rao, S.S.1
|