Microcantilever array with embedded metal oxide semiconductor field effect transistor actuators for deflection control, deflection sensing, and high frequency oscillation

Applied Physics Letters

Volumn 94, Issue 22, 2009, Pages

  Chou, Stanley S ^a   Kim, Yun Young ^b   Srivastava, Arvind ^a   Murphy, Benjamin ^b   Balogun, Oluwaseyi ^b   Tark, Soo Hyun ^a   Shekhawat, Gajendra ^a   Dravid, Vinayak P ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

^b Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BI-MATERIAL; CANTILEVER DEFLECTION; DEFLECTION CONTROL; EMBEDDED METALS; HIGH FREQUENCY OSCILLATIONS; IN-SITU; MICROCANTILEVER ARRAYS; MICROFLUIDIC MIXING; MOS-FET; NANO SCALE; RESONANT FREQUENCIES; SATURATION CURRENT; SELF-HEATING EFFECT; STRAIN SENSORS; THERMAL EXPANSION MISMATCH;

ACTUATORS; ATOMIC FORCE MICROSCOPY; CHARGE COUPLED DEVICES; COMPOSITE MICROMECHANICS; DEFLECTION (STRUCTURES); ELECTRON BEAM LITHOGRAPHY; FIELD EFFECT TRANSISTORS; LASER INTERFEROMETRY; METALLIC COMPOUNDS; MOS DEVICES; NATURAL FREQUENCIES; SEMICONDUCTING SILICON COMPOUNDS; SILICON ON INSULATOR TECHNOLOGY; THERMAL EXPANSION;

MOSFET DEVICES;

EID: 66749093484     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3133333     Document Type: Article

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