Electron beam induced crystallization of sputter deposited amorphous alumina thin films

Materials Letters

Volumn 74, Issue , 2012, Pages 12-15

  Murray, Jack ^a   Song, Kai ^a   Huebner, Wayne ^a   O'Keefe, Matthew ^a  

^a University of Missouri Rolla   (United States)

Author keywords

Alumina; Amorphous; Capacitor; Crystallization; Thin film

Indexed keywords

ACCELERATING VOLTAGES; AMORPHOUS ALUMINA; BRIGHT FIELDS; DARK FIELD; ELECTRON BEAM-INDUCED CRYSTALLIZATION; RING PATTERNS; SELECTED-AREA DIFFRACTION PATTERNS; TEM IMAGES; THIN-FILM CAPACITORS; TRANSMISSION ELECTRON MICROSCOPE;

ALUMINA; AMORPHOUS MATERIALS; CAPACITORS; CRYSTAL GROWTH; CRYSTALLIZATION; ELECTRON BEAMS; THIN FILM CIRCUITS; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS FILMS;

EID: 84856777536     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2012.01.039     Document Type: Article

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