SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2408-2412

A microstructure for thermal conductivity measurement of conductive thin films

(3) Thuau, D a Koymen, I a Cheung, R a

a UNIVERSITY OF EDINBURGH (United Kingdom)

Author keywords

Conductive thin film; MEMS; Microstructure; Thermal conductivity

Indexed keywords

BULK MATERIALS; CONDUCTIVE THIN FILM; INDIUM TIN OXIDE; MEMS APPLICATIONS; MEMS-STRUCTURE; THERMAL CONDUCTIVITY MEASUREMENTS; THIN FILM MATERIAL;

CHARACTERIZATION; CONDUCTIVE FILMS; INDIUM COMPOUNDS; MATERIALS HANDLING EQUIPMENT; MECHANICAL PROPERTIES; MICROSTRUCTURE; OXIDE FILMS; THERMODYNAMIC PROPERTIES; THIN FILMS; TIN; TIN OXIDES; TITANIUM; TITANIUM OXIDES;

THERMAL CONDUCTIVITY OF SOLIDS;

EID: 79960037208 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2010.12.119 Document Type: Conference Paper

Times cited : (31)

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