Novel plasma treatment in linear antenna microwave PECVD system

Vacuum

Volumn 86, Issue 6, 2012, Pages 603-607

  Neykova, Neda ^a,b   Kozak, Halyna ^a   Ledinsky, Martin ^a   Kromka, Alexander ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

Author keywords

FTIR; Low temperature hydrogen termination; Nano crystalline diamond; SU 8; Surface conductivity

Indexed keywords

FTIR; LOW TEMPERATURES; NANOCRYSTALLINES; SU-8; SURFACE CONDUCTIVITY;

ANTENNAS; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; DIAMONDS; ELECTRIC CONDUCTIVITY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN; MICROWAVES; PASSIVATION; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; POLYMER FILMS;

DIAMOND FILMS;

EID: 84856537598     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.07.055     Document Type: Conference Paper

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