SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 201, Issue 15, 2007, Pages 6631-6634

Hydrogen-free carbon thin films prepared by new type surface-wave-sustained plasma (SWP)

(5) Xu, Junqi a,b Fan, Huiqing a Kousaka, Hiroyuki c Umehara, Noritsugu c Liu, Weiguo b

a NORTHWESTERN POLYTECHNICAL UNIVERSITY (China)

b XI'AN TECHNOLOGICAL UNIVERSITY (China)

c NAGOYA UNIVERSITY (Japan)

Author keywords

Amorphous carbon films; DLC; Plasma density; Raman spectroscopy; Surface wave sustained plasma (SWP)

Indexed keywords

AMORPHOUS CARBON; GRAIN SIZE AND SHAPE; GRAPHITE; LANGMUIR PROBES; PLASMA APPLICATIONS; PLASMA DENSITY; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; THIN FILMS;

AMORPHOUS CARBON FILMS; SURFACE-WAVE-SUSTAINED PLASMA;

CARBON FILMS;

AMORPHOUS CARBON; CARBON FILMS; GRAIN SIZE AND SHAPE; GRAPHITE; LANGMUIR PROBES; PLASMA APPLICATIONS; PLASMA DENSITY; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; THIN FILMS;

EID: 33847354753 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2006.09.016 Document Type: Article

Times cited : (6)

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