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The difficulties associated with measuring energy distributions at high-frequency, rf-biased electrodes can be found in J. R. Woodward, I. C. Abraham, M. E. Riley, P. A. Miller, T. W. Hamilton, B. P. Aragon, R. J. Shul, and C. G. Willison, J. Vac. Sci. Technol. A 20, 873 (2002).
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18
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0041292243
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note
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