Integration of ZnO nanostructures with MEMS for ethanol sensor

Sensors and Actuators, B: Chemical

Volumn 161, Issue 1, 2012, Pages 923-928

  Pandya, H J ^a   Chandra, Sudhir ^a   Vyas, A L ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

Ethanol sensor; MEMS sensor; Thermal evaporation; Zinc films; ZnO nanostructures

Indexed keywords

CATALYST-FREE SYNTHESIS; ETHANOL SENSORS; ETHANOL VAPOR; INTEGRATED MEMS; MEMS SENSOR; MICROHEATER; NANO-STRUCTURED; NANOFLAKES; OPERATING TEMPERATURE; SALIENT FEATURES; SENSING FILMS; SENSING LAYERS; SENSOR RESISTANCE; ZNO; ZNO NANOSTRUCTURES;

DYNAMIC RESPONSE; ETHANOL; INTEGRATION; NANOWIRES; OXIDE FILMS; TEMPERATURE; THERMAL EVAPORATION; VOLATILE ORGANIC COMPOUNDS; ZINC; ZINC OXIDE;

SENSORS;

EID: 84856212997     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.11.063     Document Type: Article

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