Nanoscale chemical and structural study of co-based FEBID structures by STEM-EELS and HRTEM

Nanoscale Research Letters

Volumn 6, Issue , 2011, Pages 1-6

  Córdoba, Rosa ^a   Fernández Pacheco, Rodrigo ^a,b   Fernández Pacheco, Amalio ^a   Gloter, Alexandre ^b   Magén, César ^a,c   Stéphan, Odile ^b   Ibarra, Manuel Ricardo ^a   de Teresa, José María ^a  

^a UNIVERSITY OF ZARAGOZA   (Spain)

^b UNIVERSITÉ PARIS SUD   (France)

^c FUNDACIÓN ARAID   (Spain)

Author keywords

Co deposits; EELS; FEBID; HRTEM

Indexed keywords

CO-DEPOSITS; CONTROLLED GROWTH; FEBID; FOCUSED ELECTRON BEAM INDUCED DEPOSITION; HRTEM; MAGNETIC NANOSTRUCTURES; MAGNETIC SENSING; NANO SCALE; NANO-OBJECTS; NANOMETRIC SCALE; POTENTIAL APPLICATIONS; SCANNING ELECTRON MICROSCOPE; STEM-EELS; STRUCTURAL STUDIES; SYNTHETIC PROCESS;

CARBON DIOXIDE; COBALT DEPOSITS; DEPOSITS; ELECTRON BEAMS; ELECTRONS; ENERGY DISSIPATION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAGNETIC STORAGE; NANOMAGNETICS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 84856045509     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-6-592     Document Type: Article

References (20)

1. Van Dorp WF, Hagen CW: A critical literature review of focused electron beam induced deposition. J App Phys 2008, 104:081301-081342.
2. Utke I, Hoffmann P, Melngailis J: Gas assisted focused electron beam and ion beam processing and fabrication. J Sci Vac Technol B 2008, 26:1197-1276.
3. Utke I, Hoffmann P, Berger R, Scandella L: High resolution magnetic force microscopy supertips produced by focused electron beam induced deposition. App Phys Lett 2002, 80:4792-4794.
4. Lau YM, Chee PC, Thong JTL, Ng V: Properties and applications of cobaltbased material produced by electron-beam-induced deposition. J Vac Sci Technol A 2002, 20:1295-1302.
5. Utke I, Bret T, Laub D, Buffat Ph, Scandella L, Hoffmann P: Thermal effects during focused electron beam induced deposition of nanocomposite magnetic-cobalt-containing tips. Microelectron Eng 2004, 73:553-558.
6. Utke I, Michler J, Gasser P, Santschi C, Laub D, Cantoni M, Buffat P A, Jiao C, Hoffmann P: Cross-sections investigations of compositions and sub- structures of tips obtained by focused electron beam induced deposition. Adv Eng Mater 2005, 7:323-331.
7. Fernández-Pacheco A, De Teresa JM, Córdoba R, Ibarra MR: Magnetotransport properties of high-quality cobalt nanowires grown by focused-electron-beam-induced deposition. J Phys D Appl Phys 2009, 42:055005-055010.
8. Bernau L, Gabureac M, Erni R, Utke I: Tunable nanosynthesis of composite materials by electron-impact reaction. Angew Chem 2010, 122:9064-9068.
9. Córdoba R, Sesé J, De Teresa JM, Ibarra MR: High purity cobalt nanosctructures grown by focused-electron-beam-induced deposition at low current. Microel Eng 2010, 87:1550-1553.
10. Mulders JJL, Belova LM, Riazanova A: Electron beam induced deposition at elevated temperatures: compositional changes and purity improvement. Nanotechnol 2011, 22:055302-055308.
11. Belova LM, Dahlberg ED, Riazanova A, Mulders JJL, Christophersen C, Eckert J: Rapid electron beam assisted patterning of pure cobalt at elevated temperatures via seeded growth. Nanotechnol 2011, 22:145305-145310.
12. Gabureac M, Bernau L, Utke I, Boero G: Granular Co-C nano-Hall sensors by focused-beam-induced deposition. Nanotechnol 2010, 21:115003-115007.
13. Jeanguillaume C, Colliex C: Spectrum-image: the next step in EELS digital acquisition and processing. Ultramicroscopy 1989, 28:252-257.
14. Trebbia P, Bonnet N: EELS elemental mapping with unconventional methods. 1. Theoretical basis: image-analysis with multivariate-statistics and entropy concepts. Ultramicroscopy 1990, 34:165-178.
15. A Gloter and O Stéphan, private communication.
16. Mitterbauer C, Kothleitner G, Grogger W, Zandbergen H, Freitag B, Tiemeijer P, Hofer F: Electron energy-loss near-edge structures of 3d transition metal oxides recorded at high-energy resolution. Ultramicroscopy 2003, 96:469-480.
17. Golla-Schindler U, Benner G, Putnis A: Laterally resolved EELS for ELNES mapping of the Fe L2,3- and O K-edge. Ultramicroscopy 2003, 96:573-582.
18. Fernández-Pacheco A, De Teresa JM, Córdoba R, Ibarra MR, Petit D, Read DE, O'Brien L, Lewis ER, Zeng HT, Cowburn RP: Domain wall conduit behavior in cobalt nanowires grown by focused-electron-beam-induced deposition. App Phys Lett 2009, 94:192509-192511.
19. Fernández-Pacheco A, De Teresa JM, Szkudlarek A, Córdoba R, Ibarra MR, Petit D, O'Brien L, Zeng HT, Lewis ER, Read DE, Cowburn RP: Magnetization reversal in individual Co micro- and nano-wires grown by focused-electron-beam-induced deposition. Nanotechnol 2009, 20:475704-475712.
20. Utke I, Golzhauser A, Angew: Small, minimally invasive, direct: electrons induce local reactions of adsorbed functional molecules on the nanoscale. Chem Int Ed 2010, 49:9328-9330.