KrF excimer laser micromachining of MEMS materials: Characterization and applications

Journal of Micromechanics and Microengineering

Volumn 22, Issue 1, 2012, Pages

  Liu, Kewei ^a   Nickolov, Zhorro ^b   Oh, Jonghyun ^a   Moses Noh, Hongseok ^a  

^a Drexel University   (United States)

^b DREXEL UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3D MICRO-FABRICATION; ABLATION PARAMETERS; CHARACTERIZATION STUDIES; ETCH RATES; EXCIMER LASER MICROMACHINING; FLUENCES; KRF EXCIMER LASER; LATERAL DIRECTIONS; MEMS MATERIALS; MICRO-FABRICATION TECHNIQUES; MICROSCALE DEVICES; MICROSCALE STRUCTURES; PHYSICAL DEFORMATION; POLYDIMETHYSILOXANE; SEM IMAGING; SODA LIME GLASS; SU-8 PHOTORESIST; THREE-DIMENSIONAL (3D) MICROFABRICATION;

ABLATION; ASPECT RATIO; CHARACTERIZATION; COMPOSITE MICROMECHANICS; EXCIMER LASERS; GLASS LASERS; LASER ABLATION; LASER PULSES; MATERIALS; MICROANALYSIS; MICROCHANNELS; MICROFABRICATION; MICROMACHINING; PHOTORESISTS; THREE DIMENSIONAL;

MEMS;

EID: 84855772496     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/1/015012     Document Type: Article

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