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Volumn 11, Issue 5, 2002, Pages 668-674

Effects of polymer properties on laser ablation behaviour

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CORRELATION METHODS; GLASS TRANSITION; IRRADIATION; POLYMERS; THIN FILMS; ULTRAVIOLET RADIATION;

EID: 0036805150     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/11/5/307     Document Type: Article
Times cited : (40)

References (22)
  • 1
    • 0000689014 scopus 로고    scopus 로고
    • Nanometer-nanosecond oscillatory expansion and contraction behaviour of polymer films induced by 248 nm excimer laser excitation
    • Masubuchi T., Furutani H., Fukumura H. and Masuhara H. 2000 Nanometer-nanosecond oscillatory expansion and contraction behaviour of polymer films induced by 248 nm excimer laser excitation Chem. Phys. Chem. 1 137-9.
    • (2000) Chem. Phys. Chem. , vol.1 , pp. 137-139
    • Masubuchi, T.1    Furutani, H.2    Fukumura, H.3    Masuhara, H.4
  • 2
    • 0035810436 scopus 로고    scopus 로고
    • Laser-induced nanometer-nanosecond expansion and contraction dynamics of poly(methyl methacrylate) film studied by time-resolved interferometry
    • Masubuchi T., Furutani H., Fukumura H. and Masuhara H. 2001 Laser-induced nanometer-nanosecond expansion and contraction dynamics of poly(methyl methacrylate) film studied by time-resolved interferometry J. Phys. Chem. B 105 2518-24.
    • (2001) J. Phys. Chem. B , vol.105 , pp. 2518-2524
    • Masubuchi, T.1    Furutani, H.2    Fukumura, H.3    Masuhara, H.4
  • 3
    • 4243389747 scopus 로고    scopus 로고
    • Laser-ablation mechanism and plume dynamics of polyarylsulfone films studied by laser ionisation time-of-flight mass spectrometry
    • Grivas C., Niino H. and Yabe A. 1999 Laser-ablation mechanism and plume dynamics of polyarylsulfone films studied by laser ionisation time-of-flight mass spectrometry Appl. Phys, A 69 S159-63.
    • (1999) Appl. Phys. A , vol.69
    • Grivas, C.1    Niino, H.2    Yabe, A.3
  • 4
    • 0031100260 scopus 로고    scopus 로고
    • Incubation and photoablation of poly(methyl methacrylate) at 248 nm. New insight into the reaction mechanism using photofragment translational spectroscopy
    • Krajnovich D.J. 1997 Incubation and photoablation of poly(methyl methacrylate) at 248 nm. New insight into the reaction mechanism using photofragment translational spectroscopy J. Phys. Chem. A 101 2033-9.
    • (1997) J. Phys. Chem. A , vol.101 , pp. 2033-2039
    • Krajnovich, D.J.1
  • 5
    • 0023307088 scopus 로고
    • Direct observation of excimer-laser photoablation products from polymers by picosecond-UV-laser mass spectroscopy
    • Larciprete R. and Stuke M. 1987 Direct observation of excimer-laser photoablation products from polymers by picosecond-UV-laser mass spectroscopy Appl. Phys. B 42 181-4.
    • (1987) Appl. Phys. B , vol.42 , pp. 181-184
    • Larciprete, R.1    Stuke, M.2
  • 6
    • 0029196872 scopus 로고
    • Multiphoton ionization-mass spectrometric study of laser ablation of poly(methyl methacrylate) and polystyrene at 308 nm
    • Tsunekawa M., Nishio S. and Sato H. 1995 Multiphoton ionization-mass spectrometric study of laser ablation of poly(methyl methacrylate) and polystyrene at 308 nm Japan. J. Appl. Phys. 34 218-25.
    • (1995) Japan. J. Appl. Phys. , vol.34 , pp. 218-225
    • Tsunekawa, M.1    Nishio, S.2    Sato, H.3
  • 7
    • 0028765602 scopus 로고
    • Laser induced unzipping: A thermal route to polymer ablation
    • Blanchet G.B. and Finsher C.R. Jr. 1994 Laser induced unzipping: a thermal route to polymer ablation Appl. Phys. Lett. 65 1311-13.
    • (1994) Appl. Phys. Lett. , vol.65 , pp. 1311-1313
    • Blanchet, G.B.1    Finsher C.R., Jr.2
  • 8
    • 0001617184 scopus 로고
    • Ultrafast imaging of ultraviolet laser ablation and etching of polymethylmethacrylate
    • Srinivasan R., Braren B., Casey K.G. and Yeh M. 1989 Ultrafast imaging of ultraviolet laser ablation and etching of polymethylmethacrylate Appl. Phys. Lett. 55 2790-1.
    • (1989) Appl. Phys. Lett. , vol.55 , pp. 2790-2791
    • Srinivasan, R.1    Braren, B.2    Casey, K.G.3    Yeh, M.4
  • 9
    • 0001135204 scopus 로고    scopus 로고
    • The 248 nm excimer-laser-ablation mechanism of liquid benzene derivatives: Photochemical formation of benzyl radical leads to ablation
    • Tsuboi Y., Hatanaka K., Fukumura H. and Masuhara H. 1998 The 248 nm excimer-laser-ablation mechanism of liquid benzene derivatives: photochemical formation of benzyl radical leads to ablation J. Phys. Chem. A 102 1661-5.
    • (1998) J. Phys. Chem. A , vol.102 , pp. 1661-1665
    • Tsuboi, Y.1    Hatanaka, K.2    Fukumura, H.3    Masuhara, H.4
  • 10
    • 25944444845 scopus 로고
    • Ultrafast temperature jump in polymers: Phonons and vibrations heat up at different rates
    • Wen X., Tolbert W.A. and Dlott D.D. 1993 Ultrafast temperature jump in polymers: phonons and vibrations heat up at different rates J. Chem. Phys. 99 4140-51.
    • (1993) J. Chem. Phys. , vol.99 , pp. 4140-4151
    • Wen, X.1    Tolbert, W.A.2    Dlott, D.D.3
  • 11
    • 0031098173 scopus 로고    scopus 로고
    • Molecular dynamics model for laser ablation and desorption of organic solids
    • Zhigilei L.V., Kodali P.B.S. and Garrison B.J. 1997 Molecular dynamics model for laser ablation and desorption of organic solids J. Phys. Chem. B 101 2028-37.
    • (1997) J. Phys. Chem. B , vol.101 , pp. 2028-2037
    • Zhigilei, L.V.1    Kodali, P.B.S.2    Garrison, B.J.3
  • 15
    • 0027589993 scopus 로고
    • Molecular dynamics study of solid melting and vaporization by laser irradiation
    • Kotake S. and Kuroki M. 1993 Molecular dynamics study of solid melting and vaporization by laser irradiation Int. J. Heat Mass Transfer 36 2061-7.
    • (1993) Int. J. Heat Mass Transfer , vol.36 , pp. 2061-2067
    • Kotake, S.1    Kuroki, M.2
  • 16
    • 0141547719 scopus 로고    scopus 로고
    • Polymer laser photochemistry, ablation, reconstruction, and polymerization
    • Sato H. and Nishio S. 2001 Polymer laser photochemistry, ablation, reconstruction, and polymerization J. Photochem. Photobiol. 2 139-52.
    • (2001) J. Photochem. Photobiol. , vol.2 , pp. 139-152
    • Sato, H.1    Nishio, S.2
  • 18
    • 0001735419 scopus 로고    scopus 로고
    • Comparison of the ablation behaviour of polymer films in the IR and UV with nanosecond and picosecond pulse
    • Hahn C.H., Lippert T. and Wokaun A. 1999 Comparison of the ablation behaviour of polymer films in the IR and UV with nanosecond and picosecond pulse J. Phys. Chem. B 103 1287-94.
    • (1999) J. Phys. Chem. B , vol.103 , pp. 1287-1294
    • Hahn, C.H.1    Lippert, T.2    Wokaun, A.3
  • 19
    • 0001461179 scopus 로고    scopus 로고
    • Photothermal transient expansion and contraction dynamics of polymer films by nanosecond interferometry
    • Furutani H., Fukumura H. and Masuhara H. 1996 Photothermal transient expansion and contraction dynamics of polymer films by nanosecond interferometry J. Phys. Chem. 100 6871-5.
    • (1996) J. Phys. Chem. , vol.100 , pp. 6871-6875
    • Furutani, H.1    Fukumura, H.2    Masuhara, H.3
  • 21
    • 0003937505 scopus 로고
    • Bellingham, WA: SPIE Optical Engineering Press
    • Dammel R.R. 1993 Diazonaphthoquinone-Based Resists vol TT-11 (Bellingham, WA: SPIE Optical Engineering Press).
    • (1993) Diazonaphthoquinone-Based Resists , vol.TT-11
    • Dammel, R.R.1
  • 22
    • 0034246042 scopus 로고    scopus 로고
    • Monitoring photoresist glass transition temperature versus processing parameters via NMR broad band spectroscopy
    • Nicolau D.V. and Bercu C. 2000 Monitoring photoresist glass transition temperature versus processing parameters via NMR broad band spectroscopy Microelectron. J. 31 677-83
    • (2000) Microelectron. J. , vol.31 , pp. 677-683
    • Nicolau, D.V.1    Bercu, C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.