Excimer laser micromachining of structures using SU-8

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 85-91

  Ghantasala, Muralidhar K ^a   Harvey, Erol C ^a   Sood, Dinesh K ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ETCH RATE; HIGH ASPECT RATIO STRUCTURE; LASER FLUENCE; LASER MICROMACHINING; PREBAKE; PROFILOMETRY;

ASPECT RATIO; ETCHING; EXCIMER LASERS; MORPHOLOGY; OPTICAL MICROSCOPY; PHOTORESISTS; POLYIMIDES; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS;

LASER ABLATION;

EID: 0033309891     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)