SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 30, Issue 1, 2012, Pages

Combination of characterization techniques for atomic layer deposition MoO3 coatings: From the amorphous to the orthorhombicα-MoO 3 crystalline phase

(8) Diskus, Madeleine a Nilsen, Ola a Fjellvg, Helmer a Diplas, Spyros b Beato, Pablo c Harvey, Clare d Van Schrojenstein Lantman, Evelien d Weckhuysen, Bert M d

a Centre for Material Science and Nanotechnology (Norway)

b SINTEF MATERIALS AND CHEMISTRY (Norway)

c HALDOR TOPSØE A S (Denmark)

d UTRECHT UNIVERSITY (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; AMORPHOUS THIN FILMS; ANGLE-RESOLVED X-RAY PHOTOELECTRON SPECTROSCOPY; CHARACTERIZATION TECHNIQUES; CRYSTALITES; CRYSTALLINE PHASE; CRYSTALLIZATION PATHWAY; DEPTH PROFILE; ISLAND GROWTH; MORPHOLOGY AND SIZE; RAMAN ANALYSIS; RAMAN INTENSITIES; SI (1 1 1);

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; ATOMIC LAYER DEPOSITION; ATOMIC SPECTROSCOPY; CRYSTALLINE MATERIALS; DEPOSITION; INTERFACES (MATERIALS); MOLYBDENUM; MORPHOLOGY; PHOTONS; RAMAN SPECTROSCOPY; SILICON; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

MOLYBDENUM OXIDE;

EID: 84855567906 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3643350 Document Type: Article

Times cited : (56)

References (30)

1
- 59249104425
- 10.1016/j.tsf.2008.09.007
- H. Kim, H -B-R. Lee, and W. J. Maeng, Thin Solid Films 517, 2563 (2009). 10.1016/j.tsf.2008.09.007
- (2009) Thin Solid Films , vol.517 , pp. 2563
- Kim, H.¹ Lee, H.-B.-R.² Maeng, W.J.³

2
- 0037156103
- Atomic layer deposition (ALD): From precursors to thin film structures
- DOI 10.1016/S0040-6090(02)00117-7, PII S0040609002001177
- M. Leskelä and M. Ritala, Thin Solid Films 409, 138 (2002). 10.1016/S0040-6090(02)00117-7 (Pubitemid 34524820)
- (2002) Thin Solid Films , vol.409 , Issue.1 , pp. 138-146
- Leskela, M.¹ Ritala, M.²

3
- 0000836443
- edited by N. Hari Singh (Academic, Burlington)
- M. Ritala and M. Leskela, in Handbook of Thin Films, edited by, N. Hari Singh, (Academic, Burlington, 2002), pp. 103-159.
- (2002) Handbook of Thin Films , pp. 103-159
- Ritala, M.¹ Leskela, M.²

4
- 21744444606
- Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
- DOI 10.1063/1.1940727, 121301
- R. L. Puurunen, J. Appl. Phys. 97, 121301 (2005). 10.1063/1.1940727 (Pubitemid 40940570)
- (2005) Journal of Applied Physics , vol.97 , Issue.12 , pp. 1-52
- Puurunen, R.L.¹

5
- 1242298519
- 10.1016/j.tsf.2003.10.152
- O. Nilsen, H. Fjellvg, and A. Kjekshus, Thin Solid Films 450, 240 (2004). 10.1016/j.tsf.2003.10.152
- (2004) Thin Solid Films , vol.450 , pp. 240
- Nilsen, O.¹ Fjellvg, H.² Kjekshus, A.³

6
- 77953711053
- 10.1016/j.molstruc.2010.03.087
- A. O'Mahony, M. E. Pemble, and I. M. Povey, J. Mol. Struct. 976, 324 (2010). 10.1016/j.molstruc.2010.03.087
- (2010) J. Mol. Struct. , vol.976 , pp. 324
- O'Mahony, A.¹ Pemble, M.E.² Povey, I.M.³

7
- 64349109641
- 10.1021/jp804296a
- D. N. Goldstein, J. A. McCormick, and S. M. George, J. Phys. Chem. C 112, 19530 (2008). 10.1021/jp804296a
- (2008) J. Phys. Chem. C , vol.112 , pp. 19530
- Goldstein, D.N.¹ McCormick, J.A.² George, S.M.³

8
- 31044432506
- In situ examination of tin oxide atomic layer deposition using quartz crystal microbalance and Fourier transform infrared techniques
- DOI 10.1116/1.1914810
- X. Du, Y. Du, and S. M. George, J. Vac. Sci. Technol., A 23, 581 (2005). 10.1116/1.1914810 (Pubitemid 43119172)
- (2005) Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , vol.23 , Issue.4 , pp. 581-588
- Du, X.¹ Du, Y.² George, S.M.³

9
- 77957951107
- 10.1021/am900807a
- M. Rose, J. Niinistö, I. Endler, J. W. Bartha, P. Kücher, and M. Ritala, ACS Appl. Mater. Interfaces 2, 347 (2010). 10.1021/am900807a
- (2010) ACS Appl. Mater. Interfaces , vol.2 , pp. 347
- Rose, M.¹ Niinistö, J.² Endler, I.³ Bartha, J.W.⁴ Kücher, P.⁵ Ritala, M.⁶

10
- 77049107645
- 10.1021/cm902180d
- K. Knapas, T. Hatanpaa, M. Ritala, and M. Leskela, Chem. Mater. 22, 1386 (2010). 10.1021/cm902180d
- (2010) Chem. Mater. , vol.22 , pp. 1386
- Knapas, K.¹ Hatanpaa, T.² Ritala, M.³ Leskela, M.⁴

11
- 27544471417
- 3 films and their application in electrochromic devices
- DOI 10.1016/j.mseb.2004.12.084
- T. Ivanova, K. A. Gesheva, G. Popkirov, M. Ganchev, and E. Tzvetkova, Mater. Sci. Eng. B 119, 232 (2005). 10.1016/j.mseb.2004.12.084 (Pubitemid 41536798)
- (2005) Materials Science and Engineering B: Solid-State Materials for Advanced Technology , vol.119 , Issue.3 , pp. 232-239
- Ivanova, T.¹ Gesheva, K.A.² Popkirov, G.³ Ganchev, M.⁴ Tzvetkova, E.⁵

12
- 78751609719
- 10.1016/j.matchemphys.2010.12.007
- D. E. Diaz-Droguett and V. M. Fuenzalida, Mater. Chem. Phys. 126, 82 (2011). 10.1016/j.matchemphys.2010.12.007
- (2011) Mater. Chem. Phys. , vol.126 , pp. 82
- Diaz-Droguett, D.E.¹ Fuenzalida, V.M.²

13
- 3442898488
- 10.1016/j.jcat.2004.04.028
- K. V. R. Chary, K. R. Reddy, G. Kishan, J. W. Niemantsverdriet, and G. Mestl, J. Catal. 226, 283 (2004). 10.1016/j.jcat.2004.04.028
- (2004) J. Catal. , vol.226 , pp. 283
- Chary, K.V.R.¹ Reddy, K.R.² Kishan, G.³ Niemantsverdriet, J.W.⁴ Mestl, G.⁵

14
- 34247108315
- Structural characterization and catalytic activity of molybdenum oxide supported zirconia catalysts
- DOI 10.1016/j.micromeso.2006.12.037, PII S1387181106005750
- E. A. El-Sharkawy, A. S. Khder, and A. I. Ahmed, Microporous Mesoporous Mater. 102, 128 (2007). 10.1016/j.micromeso.2006.12.037 (Pubitemid 46603103)
- (2007) Microporous and Mesoporous Materials , vol.102 , Issue.1-3 , pp. 128-137
- El-Sharkawy, E.A.¹ Khder, A.S.² Ahmed, A.I.³

15
- 37049066745
- M. Fournier, A. Aouissi, and C. Rocchiccioli-Deltcheff, J. Chem. Soc., Chem. Commun. 307 (1994).
- (1994) J. Chem. Soc., Chem. Commun. , vol.307
- Fournier, M.¹ Aouissi, A.² Rocchiccioli-Deltcheff, C.³

16
- 0036963976
- 10.1006/jcat.2002.3659
- T. Ressler, J. Wienold, R. E. Jentoft, and T. Neisius, J. Catal. 210, 67 (2002). 10.1006/jcat.2002.3659
- (2002) J. Catal. , vol.210 , pp. 67
- Ressler, T.¹ Wienold, J.² Jentoft, R.E.³ Neisius, T.⁴

17
- 0034225012
- 10.1021/jp000690t
- T. Ressler, R. E. Jentoft, J. Wienold, M. M. Gunter, and O. Timpe, J.Phys. Chem. B 104, 6360 (2000). 10.1021/jp000690t
- (2000) J.Phys. Chem. B , vol.104 , pp. 6360
- Ressler, T.¹ Jentoft, R.E.² Wienold, J.³ Gunter, M.M.⁴ Timpe, O.⁵

18
- 85046983264
- I. Jurez Ramirez and A. Martnez-de la Cruz, J. Solid State Electrochem. 7, 259 (2003).
- (2003) J. Solid State Electrochem , vol.7 , pp. 259
- Jurez Ramirez, I.¹ Martnez-De La Cruz, A.²

19
- 0037214570
- 10.1016/S0167-577X(02)00920-5
- I. Jurez Ramirez and A. Martinez-de la Cruz, Mater. Lett. 57, 1034 (2003). 10.1016/S0167-577X(02)00920-5
- (2003) Mater. Lett. , vol.57 , pp. 1034
- Jurez Ramirez, I.¹ Martinez-De La Cruz, A.²

20
- 78650443592
- 10.1039/c0jm01099e
- M. Diskus, O. Nilsen, and H. Fjellvaag, J. Mater. Chem. 21, 705 (2011). 10.1039/c0jm01099e
- (2011) J. Mater. Chem. , vol.21 , pp. 705
- Diskus, M.¹ Nilsen, O.² Fjellvaag, H.³

21
- 0000075419
- 10.1016/0169-4332(95)00169-7
- J. L. Sullivan, W. Yu, and S. O. Saied, Appl. Surf. Sci. 90, 309 (1995). 10.1016/0169-4332(95)00169-7
- (1995) Appl. Surf. Sci. , vol.90 , pp. 309
- Sullivan, J.L.¹ Yu, W.² Saied, S.O.³

22
- 33646705653
- 10.1002/sia.v38:4
- S. Oswald, M. Zier, R. Reiche, and K. Wetzig, Surf. Interface Anal. 38, 590 (2006). 10.1002/sia.v38:4
- (2006) Surf. Interface Anal. , vol.38 , pp. 590
- Oswald, S.¹ Zier, M.² Reiche, R.³ Wetzig, K.⁴

23
- 0346277018
- 10.1002/sia.v35:13
- R. Champaneria, P. Mack, R. White, and J. Wolstenholme, Surf. Interface Anal. 35, 1028 (2003). 10.1002/sia.v35:13
- (2003) Surf. Interface Anal. , vol.35 , pp. 1028
- Champaneria, R.¹ MacK, P.² White, R.³ Wolstenholme, J.⁴

24
- 0024777619
- 3
- DOI 10.1016/0584-8547(89)80077-1
- M. Anwar, C. A. Hogarth, G. A. Khan, and R. Bulpett, Spectrochim. Acta, Part B 44, 789 (1989). 10.1016/0584-8547(89)80077-1 (Pubitemid 21727481)
- (1989) Spectrochimica acta, Part B: Atomic spectroscopy , vol.44 , Issue.8 , pp. 789-793
- Anwar, M.¹ Hogarth, C.A.² Khan, G.A.³ Bulpett, R.⁴

25
- 1342285623
- 10.1016/j.susc.2004.01.010
- T. Schroeder, J. Zegenhagen, N. Magg, B. Immaraporn, and H. J. Freund, Surf. Sci. 552, 85 (2004). 10.1016/j.susc.2004.01.010
- (2004) Surf. Sci. , vol.552 , pp. 85
- Schroeder, T.¹ Zegenhagen, J.² Magg, N.³ Immaraporn, B.⁴ Freund, H.J.⁵

26
- 0003037887
- 10.1016/0368-2048(94)02270-4
- P. J. Cumpson, J. Electron Spectrosc. Relat. Phenom. 73, 25 (1995). 10.1016/0368-2048(94)02270-4
- (1995) J. Electron Spectrosc. Relat. Phenom. , vol.73 , pp. 25
- Cumpson, P.J.¹

27
- 0031235965
- 10.1016/S0169-4332(97)00185-2
- Y. V. Plyuto, I. V. Babich, I. V. Plyuto, A. D. Van Langeveld, and J. A. Moulijn, Appl. Surf. Sci. 119, 11 (1997). 10.1016/S0169-4332(97)00185-2
- (1997) Appl. Surf. Sci. , vol.119 , pp. 11
- Plyuto, Y.V.¹ Babich, I.V.² Plyuto, I.V.³ Van Langeveld, A.D.⁴ Moulijn, J.A.⁵

28
- 84889752667
- E. M. McCarron, J. Chem. Soc., Chem. Commun. 336 (1986).
- (1986) J. Chem. Soc., Chem. Commun. , vol.336
- McCarron, E.M.¹

29
- 0019010260
- 10.1016/0378-4363(81)90278-3
- M. A. Py and K. Maschke, Physica BC 105, 370 (1981). 10.1016/0378- 4363(81)90278-3
- (1981) Physica BC , vol.105 , pp. 370
- Py, M.A.¹ Maschke, K.²

30
- 0036497177
- 10.1039/b107012f
- M. Dieterle, G. Weinberg, and G. Mestl, Phys. Chem. Chem. Phys. 4, 812 (2002). 10.1039/b107012f
- (2002) Phys. Chem. Chem. Phys. , vol.4 , pp. 812
- Dieterle, M.¹ Weinberg, G.² Mestl, G.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.