A fully integrated optofluidic attenuator

Journal of Micromechanics and Microengineering

Volumn 21, Issue 12, 2011, Pages

  Müller, Philipp ^a   Kloss, Anton ^a   Liebetraut, Peter ^a   Mönch, Wolfgang ^a   Zappe, Hans ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AQUEOUS LIQUIDS; DRY FILM RESIST; DYNAMIC RANGE; ELECTRO WETTING; EXTERNAL COMPONENTS; FULLY INTEGRATED; MOVING PARTS; ON CHIPS; OPTICAL ATTENUATORS; TRANSMISSION SPECTRUMS; WAFER LEVEL;

ACTUATORS; EMISSION SPECTROSCOPY; LIGHT TRANSMISSION; WAFER BONDING;

LIQUIDS;

EID: 84855433171     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/12/125027     Document Type: Article

References (51)

1. Monat C, Domachuk P and Eggleton B 2007 Integrated optofluidics: a new river of light Nature Photonics 1 106-14
2. Hayes R A and Feenstra B J 2003 Video-speed electronic paper based on electrowetting Nature 425 383-5 (Pubitemid 37187263)
3. Zhou K, Heikenfeld J, Dean K A, Howard E M and Johnson M R 2009 A full description of a simple and scalable fabrication process for electrowetting displays J. Micromech. Microeng. 19 065029
4. Heikenfeld J, Zhou K, Kreit E, Raj B, Yang S, Sun B, Milarcik A, Clapp L and Schwartz R 2009 Electrofluidic displays using young-Laplace transposition of brilliant pigment dispersions Nature Photonics 3 292-6
5. Yang S, Zhou K, Kreit E and Heikenfeld J 2010 High reflectivity electrofluidic pixels with zero-power grayscale operation Appl. Phys. Lett. 97 143501
6. Chikazawa Y and Gotoh T 2007 Variable iris using charged opaque particles US Patent US2007/0205671 A1
7. Tsai C G and Yeh J A 2010 Circular dielectric liquid iris Opt. Lett. 35 2484-6
8. Müller P, Spengler N, Zappe H and Mönch W 2010 An optofluidic concept for a tunable micro-iris J. Microelectromech. Syst. 19 1477-84
9. Lea Michael C 1981 Optical modulators based on electrocapillarity Opt. Lett. 6 395-7
10. Hongbin Y, Guangya Z, Siong C F and Feiwen L 2008 A variable optical attenuator based on optofluidic technology J. Micromech. Microeng. 18 5
11. Jackel J L, Hackwood S and Beni G 1982 Electrowetting optical switch Appl. Phys. Lett. 40 4-5
12. Campbell K, Groisman A, Levy U, Pang L, Mookherjea S, Psaltis D and Fainman Y 2004 A microfluidic 2 × 2 optical switch Appl. Phys. Lett. 85 6119-21
13. Tsai J T H, Chih-Ming H, Wang F-C and Liang C-T 2009 Ultrahigh contrast light valve driven by electrocapillarity of liquid gallium Appl. Phys. Lett. 95 251110
14. Kim C-H, Jung K-D and Kim W 2009 A wafer-level micro mechanical global shutter for a micro camera Optical MEMS 2009 (Sorrento, Italy) pp 156-9
15. Syms R R A, Zou H, Stagg J and Veladi H 2004 Sliding-blade MEMS IRIS and variable optical attenuator J. Micromech. Microeng. 14 1700-10 (Pubitemid 40002293)
16. Choi H-Y, Han W and Cho Y-H 2010 Low-power high-speed electromagnetic flapping shutters using trapezoidal shutter blades suspended by h-type torsional springs J. Microelectromech. Syst. 19 1422-9
17. Ren H and Shin-Tson W 2010 Optical switch using a deformable liquid droplet Opt. Lett. 35 3826-8
18. Murade C U, Oh J M, van den Ende D and Mugele F 2011 Electrowetting driven optical switch and tunable aperture Opt. Express 19 15525-31
19. Müller P, Kloss A, Mönch W and Zappe H 2011 Bistable optofluidic attenuator with integrated electrowetting actuation and high dynamic range 16th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers'11) pp 1550-3
20. Mugele F and Baret J-C 2005 Electrowetting: from basics to applications J. Phys.: Condens. Matter 17 R705-74
21. Pollack M G, Fair R B and Shenderov A D 2000 Electrowetting-based actuation of liquid droplets for microfluidic applications Appl. Phys. Lett. 77 1725-6
22. Fan S-K, Hsieh T-H and Lin D-Y 2009 General digital microfluidic platform manipulating dielectric and conductive droplets by dielectrophoresis and electrowetting Lab Chip 9 1236-42
23. Malic L, Veres T and Tabrizian M 2009 Biochip functionalization using electrowetting-on-dielectric digital microfluidics for surface plasmon resonance imaging detection of dna hybridization Biosens. Bioelectron. 24 2218-24
24. Colgate E and Matsumoto H 1990 An investigation of electrowetting-based microactuation J. Vac. Sci. Technol. A 8 3625-33
25. Welters W J J and Fokkink L G J 1998 Fast electrically switchable capillary effects Langmuir 14 1535-8 (Pubitemid 128587134)
26. Kim C-J 2001 Micropumping by electrowetting Proc. of 2001A SME Int. Mechanical Engineering Congress and Exposition (New York, 11-6 Nov. 2001) pp 1-8
27. Lee J, Moon H, Fowler J, Schoellhammer T and Kim C-J 2002 Electrowetting and electrowetting-on-dielectric for microscale liquid handling Sensors Actuators A 95 259-68 (Pubitemid 34061315)
28. Jones T B 2005 An electromechanical interpretation of electrowetting J. Micromech. Microeng. 15 1184-7 (Pubitemid 40673101)
29. Mugele F and Buehrle J 2007 Equilibrium drop surface profiles in electric fields J. Phys.: Condens. Matter 19 375112
30. Kang K H 2002 How electrostatic fields change contact angle in electrowetting Langmuir 18 10318-22
31. Henriksson U and Eriksson J C 2004 Thermodynamics of capillary rise: Why is the meniscus curved? J. Chem. Educ. 81 150-4
32. Jones T B 2002 On the relationship of dielectrophoresis and electrowetting Langmuir 18 4437-43 (Pubitemid 35383619)
33. Prins M W J, Welters W J J and Weekamp J W 2001 Fluid control in multichannel structures by electrocapillary pressure Science 291 277-80 (Pubitemid 32096306)
34. Baret J-C and Decré M 2005 Electroactuation of fluid using topographical wetting transitions Langmuir 21 12218-21 (Pubitemid 43037185)
35. Hong J S, Sung Hee K, Kang K H and Kang I S 2008 A numerical investigation on ac electrowetting of a droplet Microfluid Nanofluid 5 263-71
36. Kumari N, Bahadur V and Garimella S V 2008 Electrical actuation of electrically conducting and insulating droplets using ac and dc voltages J. Micromech. Microeng. 18 105015
37. Jones T B, Fowler J D, Chang Y S and Kim C-J 2003 Frequency-based relationship of electrowetting and dielectrophoretic liquid microactuation Langmuir 19 7646-51
38. Li F and Mugele F 2008 How to make sticky surfaces slippery: contact angle hysteresis in electrowetting with alternating voltage Appl. Phys. Lett. 92 244108
39. Kilaru M K 2009 Electrowetting switchable retroreflectors PhD Thesis Department of Electrical and Computer Engineering of the College of Engineering, University of Cincinnati
40. Raj B, Dhindsa M, Smith N R, Laughlin R and Heikenfeld J 2009 Ion and liquid dependent dielectric failure in electrowetting systems Langmuir 25 12387-92
41. Roques-Carmes T, Palmier S, Hayes R A and Schlangen L J M 2005 The effect of the oil/water interfacial tension on electrowetting driven fluid motion Colloids Surf. A 267 56-63 (Pubitemid 41368091)
42. Vulto P, Huesgen T, Albrecht B and Urban G A 2009 A full-wafer fabrication process for glass microfluidic chips with integrated electroplated electrodes by direct bonding of dry film resist J. Micromech. Microeng. 19 077001
43. Huesgen T, Lenk G, Albrecht B, Vulto P, Lemke T and Woias P 2010 Optimization and characterization of wafer-level adhesive bonding with patterned dry-film photoresist for 3d MEMS integration Sensors Actuators A 162 137-44
44. Pollack M G, Shenderovb A D and Fair R B 2002 Electrowetting-based actuation of droplets for integrated microfluidics Lab on a Chip 2 96-101 (Pubitemid 37254508)
45. Kedzierski J, Berry S and Abedian B 2009 New generation of digital microfluidic devices J. Microelectromech. Syst. 18 845-51
46. Dhindsa M, Heikenfeld J, Kwon S, Park J, Rackb P D and Papautsky I 2010 Virtual electrowetting channels: electronic liquid transport with continuous channel functionality Lab on a Chip 10 832-6
47. Roques-Carmes T, Hayes R A, Feenstra B J and Schlangen L J M 2004 Liquid behavior inside a reflective display pixel based on electrowetting J. Appl. Phys. 95 4389-96
48. Lee J and Kim C J 2000 Surface-tension-driven microactuation based on continuous electrowetting J. Microelectromech. Syst. 9 171-80
49. Chang J h, Choi D Y, Han S and Pak J J 2010 Driving characteristics of the electrowetting-on-dielectric device using atomic-layer-deposited aluminum oxide as the dielectric Microfluid Nanofluid 8 269-73
50. Cho S K, Fan S-K, Moon H and Kim C-J 2002 Towards digital microfluidic circuits: creating, transporting, cutting and merging liquid droplets by electrowetting-based actuation Proc. of 15th IEEE Int. Conf. on Micro Electro Mechanical Systems, Las Vegas pp 32-35 (Pubitemid 34216217)
51. Jones T B 2001 Dielectrophoretic liquid actuation and nanodroplet formation J. Appl. Phys. 89 1441-8 (Pubitemid 33661909)