An optofluidic concept for a tunable micro-iris

Journal of Microelectromechanical Systems

Volumn 19, Issue 6, 2010, Pages 1477-1484

  Müller, Philipp ^a   Spengler, Nils ^b   Zappe, Hans ^a   Mönch, Wolfgang ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b PALO ALTO RESEARCH CENTER   (United States)

Author keywords

Apertures; capillary forces; micro optics; microfluidics; optofluidics

Indexed keywords

APERTURES; CAPILLARY FORCE; DRY FILM RESIST; FLEXIBLE DESIGNS; HIGH CONTRAST; MICRO-MECHANICAL; MICROFLUIDIC CHAMBERS; OPTICAL ABSORPTION; OPTO-FLUIDICS; PHOTOLITHOGRAPHIC PATTERNING; PIGMENT DISPERSIONS; TRANSMISSION MEASUREMENTS;

BLOOD VESSELS; LAMINAR FLOW;

MICROFLUIDICS;

EID: 78649664450     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2079917     Document Type: Article

References (27)

1. W. S. N. Trimmer, "Microrobots and micromechanical systems," Sens. Actuators, vol. 19, no. 3, pp. 267-287, Sep. 1989.
2. C. Lee and J. A. Yeh, "Development and evolution of MOEMS technology in variable optical attenuators," J. Micro/Nanolithogr., MEMS MOEMS, vol. 7, no. 2, p. 021 003, Jul. 2008.
3. C. H. Kim, K. D. Jung, and W. Kim, "A wafer-level micro mechanical global shutter for a micro camera," in Proc. Opt. MEMS, Sorrento, Italy, 2009, pp. 156-159.
4. R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, "Sliding-blade MEMS iris and variable optical attenuator," J. Micromech. Microeng., vol. 14, no. 12, pp. 1700-1710, Sep. 2004.
5. D. Psaltis, S. R. Quake, and C. Yang, "Developing optofluidic technology through the fusion of microfluidics and optics," Nature, vol. 442, no. 7101, pp. 381-386, Jul. 2006.
6. Q. Kou, "Collinear dual-color laser emission from a microfluidic dye laser," Appl. Phys. Lett., vol. 88, no. 9, pp. 091 101-1-091 101-3, Feb. 2006.
7. W. Song, A. E. Vasdekis, Z. Li, and D. Psaltis, "Optofluidic evanescent dye laser based on a distributed feedback circular grating," Appl. Phys. Lett., vol. 94, no. 16, pp. 161 110-1-161 110-3, Apr. 2009.
8. M. Agarwal, R. A. Gunasekaran, P. Coane, and K. Varahramyan, "Polymer-based variable focal length microlens system," J. Micromech. Microeng., vol. 14, no. 12, pp. 1665-1673, Aug. 2004.
9. D. Zhang, N. Justis, and Y. Lo, "Integrated fluidic adaptive zoom lens," Opt. Lett., vol. 29, no. 24, pp. 2855-2857, Dec. 2004. (Pubitemid 40011248)
10. Z. Wan, H. Zeng, and A. Feinerman, "Area-tunable micromirror based on electrowetting actuation of liquid-metal droplets," Appl. Phys. Lett., vol. 89, no. 20, pp. 201 107-1-201 107-3, Nov. 2006.
11. D. Erickson, T. Rockwood, T. Emery, A. Scherer, and D. Psaltis, "Nanofluidic tuning of photonic crystal circuits," Opt. Lett., vol. 31, no. 1, pp. 59-61, Jan. 2006.
12. J. Hsieh, P. Mach, F. Cattaneo, S. Yang, T. Krupenkine, K. Baldwin, and J. A. Rogers, "Tunable microfluidic optical-fiber devices based on electrowetting pumps and plastic microchannels," IEEE Photon. Technol. Lett., vol. 15, no. 1, pp. 81-83, Jan. 2003.
13. P. Domachuk, I. C. M. Littler, M. Cronin-Golomb, and B. J. Eggleton, "Compact resonant integrated microfluidic refractometer," Appl. Phys. Lett., vol. 88, no. 9, pp. 093 513-1-093 513-3, Feb. 2006.
14. P. Domachuk, C. Grillet, V. Ta'eed, J. Bolger, E. Mägi, and B. J. Eggleton, "Microfluidic interferometer," Appl. Phys. Lett., vol. 86, no. 2, p. 024 103, Jan. 2005.
15. Y. Hongbin, Z. Guangya, C. F. Siong, and L. Feiwen, "Optofluidic variable aperture," Opt. Lett., vol. 33, no. 6, pp. 548-550, Mar. 2008.
16. P. Vulto, N. Glade, L. Altomare, J. Bablet, L. D. Tin, G. Medoro, I. Chartier, N. Manaresi, M. Tartagni, and R. Guerrieri, "Microfluidic channel fabrication in dry film resist for production and prototyping of hybrid chips," Lab Chip, vol. 5, no. 2, pp. 158-162, Feb. 2005.
17. P. Vulto, T. Huesgen, B. Albrecht, and G. A. Urban, "A full-wafer fabrication process for glass microfluidic chips with integrated electroplated electrodes by direct bonding of dry film resist," J. Micromech. Microeng., vol. 19, no. 7, p. 077 001, Jun. 2009.
18. J. Heikenfeld, K. Zhou, E. Kreit, B. Raj, S. Yang, B. Sun, A. Milarcik, L. Clapp, and R. Schwartz, "Electrofluidic displays using Young-Laplace transposition of brilliant pigment dispersions," Nat. Photon., vol. 3, no. 5, pp. 292-296, May 2009.
19. P. Calvert, "Inkjet printing for materials and devices," Chem. Mater., vol. 13, no. 10, pp. 3299-3305, 2001.
20. J. Berthier, Microdrops and Digital Microfluidics. Norwich, NY: William Andrew Inc., 2008.
21. L. Riegger, M. Grumann, T. Brefka, J. Steigert, C. P. Steinert, T. Brenner, R. Zengerle, and J. Ducrée, "Bubble-free priming of blind capillaries for high-accuracy centrifugal hematocrit measurements," in Proc. 9th Int. Conf. Miniaturized Syst. Chem. Life Sci., 2005, pp. 796-798.
22. J. Kohnle, G. Waibel, R. Cernosa, M. Storz, H. Ernst, H. Sandmaier, T. Strobelt, and R. Zengerle, "A unique solution for preventing clogging of flow channels by gas bubbles," in Proc. IEEE Int. Conf. Micro Electro Mech. Syst., 2002, pp. 77-80.
23. M. Brinkmann, K. Khare, and R. Seemann, "Control of liquids by surface energies," in Microfluidic Technologies for Miniaturized Analysis Systems, S. Hardt and F. Schönfeld, Eds. Berlin, Germany: Springer-Verlag, 2007, pp. 157-197.
24. P. Vulto, S. Podszun, P. Meyer, and G. A. Urban, "Phaseguide patterns for advanced liquid handling in lab-on-a-chip systems," in Proc. Transducers, Denver, CO, 2009, pp. 409-412.
25. P. Vulto, G. Medoro, L. Altomare, G. A. Urban, M. Tartagniand, R. Guerrieri, and N. Manaresi, "Selective sample recovery of DEP-separated cells and particles by phaseguide-controlled laminar flow," J. Micromech. Microeng., vol. 16, no. 9, pp. 1847-1853, Sep. 2006.
26. F. Goldschmidtboeing, M. Rabold, and P. Woias, "Strategies for void-free liquid filling of micro cavities," J. Micromech. Microeng., vol. 16, no. 7, pp. 1321-1330, May 2006.
27. J. Melin, N. Roxhed, G. Gimenez, P. Griss, W. van der Wijngaart, and G. Stemme, "A liquid-triggered liquid microvalve for on-chip flow control," Sens. Actuators B, Chem., vol. 100, no. 3, pp. 463-468, May 2004.