Bistable optofluidic attenuator with integrated electrowetting actuation and high dynamic range

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1550-1553

  Muller P ^a   Kloss, A ^a   Monch W ^a   Zappe, H ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

dry film resist; EWOD actuator; full wafer bonding; microfluidics; oil dyes; Optical attenuator

Indexed keywords

DRY FILM RESIST; EWOD ACTUATOR; FULL WAFER BONDING; OIL DYES; OPTICAL ATTENUATORS;

ABSORPTION; ACTUATORS; ELECTRIC ATTENUATORS; ELECTROMAGNETIC WAVE ATTENUATION; EMISSION SPECTROSCOPY; LIGHT TRANSMISSION; LIQUIDS; MICROFLUIDICS; MICROSYSTEMS; SOLID-STATE SENSORS; WETTING;

WAFER BONDING;

EID: 80052129558     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969735     Document Type: Conference Paper

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