A wafer-Level micro mechanical global shutter for a micro camera

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 156-159

  Che Heung, Kim ^a   Kyu Dong, Jung ^a   Woonbae, Kim ^a  

^a SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BATCH PROCESS; COMPOSITE LAYER; MICRO CAMERAS; MICRO-MECHANICAL; MOBILE CAMERA; PULL-IN; RADIUS OF CURVATURE; SHUTTER ARRAYS; SQUARE WAVE SIGNALS; STRESS-INDUCED; WAFER LEVEL;

BATCH DATA PROCESSING; CAMERAS;

ACTUATORS;

EID: 65949098925     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805342     Document Type: Conference Paper

References (4)

1. S. Duffy et al., Microwave and Wireless comp. Lett., Vol.11, No. 3, pp. 106-108.
2. C. L. Chua et al., Proceedings of SPIE, Vol.4981(2003), pp. 150-155
3. M. Pizzi. et al., Optical MEMS,2003 IEEE/LEOS Int. Conf., pp. 173-174.
4. E. M. Chow et al., Electronic Components and Technology Conference; 2003 May 27-30, pp. 1714- 1717.