-
2
-
-
85034279863
-
-
Ph.D. thesis, Chalmers University of Technology, Gothenburg, Sweden, (unpublished)
-
M. Halvarsson, Ph.D. thesis, Chalmers University of Technology, Gothenburg, Sweden, 1994 (unpublished).
-
(1994)
-
-
Halvarsson, M.1
-
3
-
-
0027908068
-
-
S. Schiller, K. Goedicke, J. Reschke, V. Kirchhoff, S. Schneider, and F. Milde, Surf. Coat. Technol. 61, 331 (1993).
-
(1993)
Surf. Coat. Technol.
, vol.61
, pp. 331
-
-
Schiller, S.1
Goedicke, K.2
Reschke, J.3
Kirchhoff, V.4
Schneider, S.5
Milde, F.6
-
4
-
-
14644410161
-
-
W. D. Sproul, M. E. Graham, M. S. Wong, S. Lopez, D. Li, and R. A. Scholl, J. Vac. Sci. Technol. A 13, 1188 (1995).
-
(1995)
J. Vac. Sci. Technol. A
, vol.13
, pp. 1188
-
-
Sproul, W.D.1
Graham, M.E.2
Wong, M.S.3
Lopez, S.4
Li, D.5
Scholl, R.A.6
-
5
-
-
0346062937
-
-
S. Berg, M. Moradi, C. Nender, and H.-O. Blom, Surf. Coat. Technol. 39/40, 465 (1989).
-
(1989)
Surf. Coat. Technol.
, vol.39-40
, pp. 465
-
-
Berg, S.1
Moradi, M.2
Nender, C.3
Blom, H.-O.4
-
6
-
-
0031074320
-
-
M. Kharrazi, A. Azens, L. Kullman, and C. G. Granqvist, Thin Solid Films 295, 117 (1997).
-
(1997)
Thin Solid Films
, vol.295
, pp. 117
-
-
Kharrazi, M.1
Azens, A.2
Kullman, L.3
Granqvist, C.G.4
-
10
-
-
11644275689
-
-
edited by S. Rossnagel and A. Ulman Academic, San Diego
-
M. Brett, S. Dew, and T. Smy, in Physics of Thin Films, edited by S. Rossnagel and A. Ulman (Academic, San Diego, 1996), Vol. 22, p. 7.
-
(1996)
Physics of Thin Films
, vol.22
, pp. 7
-
-
Brett, M.1
Dew, S.2
Smy, T.3
-
11
-
-
0343286487
-
-
edited by R. Behrisch and K. Wittmaack Springer, Berlin
-
W. O. Hofer, in Topics in Applied Physics, edited by R. Behrisch and K. Wittmaack (Springer, Berlin, 1991), Vol. 64, p. 54.
-
(1991)
Topics in Applied Physics
, vol.64
, pp. 54
-
-
Hofer, W.O.1
-
12
-
-
0028375735
-
-
S. Dew, T. Smy, and M. Brett, Jpn. J. Appl. Phys., Part 1 33, 1140 (1994).
-
(1994)
Jpn. J. Appl. Phys., Part 1
, vol.33
, pp. 1140
-
-
Dew, S.1
Smy, T.2
Brett, M.3
-
13
-
-
36549098647
-
-
S. Berg, T. Larsson, C. Nender, and H.-O. Blom, J. Appl. Phys. 63, 887 (1988).
-
(1988)
J. Appl. Phys.
, vol.63
, pp. 887
-
-
Berg, S.1
Larsson, T.2
Nender, C.3
Blom, H.-O.4
-
14
-
-
0019606556
-
-
T. S. Eriksson, A. Hjortsberg, G. A. Niklasson, and C. G. Granqvist, Appl. Opt. 20, 2742 (1981).
-
(1981)
Appl. Opt.
, vol.20
, pp. 2742
-
-
Eriksson, T.S.1
Hjortsberg, A.2
Niklasson, G.A.3
Granqvist, C.G.4
-
16
-
-
0021473711
-
-
S. Schiller, U. Heisig, G. Beister, K. Steinfelder, J. Strumpfel, Chr. Korndorfer, and W. Sieber, Thin Solid Films 118, 255 (1984).
-
(1984)
Thin Solid Films
, vol.118
, pp. 255
-
-
Schiller, S.1
Heisig, U.2
Beister, G.3
Steinfelder, K.4
Strumpfel, J.5
Korndorfer, Chr.6
Sieber, W.7
-
20
-
-
85034293737
-
-
U. S. Patent No. 5,656,138 (Aug. 12, 1997)
-
M. A. Scobey and S. L. Bryn, U. S. Patent No. 5,656,138 (Aug. 12, 1997).
-
-
-
Scobey, M.A.1
Bryn, S.L.2
-
21
-
-
85034281140
-
-
Le Mans, May 25-29
-
K. Macák, M. Kharrazi Olsson, and U. Helmersson, Proceedings of the Eleventh International Colloquium on Plasma Processes, Le Mans, May 25-29, 1997, p. 176.
-
(1997)
Proceedings of the Eleventh International Colloquium on Plasma Processes
, pp. 176
-
-
Macák, K.1
Kharrazi Olsson, M.2
Helmersson, U.3
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