Fabrication of fluidic devices with 30 nm nanochannels by direct imprinting

Journal of Vacuum Science and Technology B

Volumn 29, Issue 6, 2011, Pages

  Fernandez Cuesta, Irene ^a,b   Liang, Xiaogan ^b,c   Zhang, Jingyu ^b   Dhuey, Scott ^b   Olynick, Deirdre ^b   Cabrini, Stefano ^b  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c POLITECNICO DI TORINO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

NANOIMPRINT LITHOGRAPHY; NANOSTRUCTURES;

BIOLOGICAL APPLICATIONS; FABRICATED DEVICE; INNOVATIVE APPROACHES; INORGANIC-ORGANIC HYBRID POLYMERS; MICRO AND NANOSTRUCTURES; MULTI-LEVEL STRUCTURES; TRANSPARENT MATERIAL; ULTRAVIOLET-NANOIMPRINT LITHOGRAPHY;

FABRICATION;

EID: 84255189763     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3662886     Document Type: Article

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