|
|
Volumn 6792, Issue , 2008, Pages
|
|
Alternative approach to transparent stamps for UV-based nanoimprint lithography - Techniques and materials
|
|
Author keywords
Hybrid polymer; Nanoimprint lithography (NIL); Sol gel; Transparent stamps; UV patterning
|
|
Indexed keywords
CHEMICAL STABILITY;
CHEMICALS;
COATING TECHNIQUES;
COLLOIDS;
ELECTRONICS ENGINEERING;
GELATION;
OXIDE MINERALS;
PIGMENTS;
POLYMERS;
QUARTZ;
SOL-GEL PROCESS;
STABILIZERS (AGENTS);
SURFACE TREATMENT;
ULTRAVIOLET RADIATION;
(1 1 0) SURFACE;
(E ,3E) PROCESS;
ALTERNATIVE APPROACH;
APPLIED (CO);
ELEVATED TEMPERATURES;
EUROPEAN;
HIGH THERMAL;
HYBRID POLYMERS;
LIFE-TIME;
MOULDING PROCESS;
NANOIMPRINT STAMPS;
PATTERNING METHODS;
RADIATION STABILITY;
RELEASE AGENTS;
SOL - GEL;
UV-BASED NANOIMPRINT LITHOGRAPHY (UV-NIL);
WORKING STAMPS;
NANOIMPRINT LITHOGRAPHY;
|
|
EID: 44949178334
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.798602 Document Type: Conference Paper |
|
Times cited : (5)
|
|
References (8)
|
