Room temperature nanoimprinting using spin-coated hydrogen silsesquioxane with high boiling point solvent

Journal of Vacuum Science and Technology B

Volumn 29, Issue 6, 2011, Pages

  Kang, Yuji ^a,b,c   Okada, Makoto ^a,b,c   Omoto, Shinya ^a,b   Haruyama, Yuichi ^a,b   Kanda, Kazuhiro ^a,b   Matsui, Shinji ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c JAPAN SOCIETY FOR THE PROMOTION OF SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; HYDROGEN; NANOIMPRINT LITHOGRAPHY; SOLVENTS; SPIN COATING;

CASTING METHOD; COATED FILMS; HYDROGEN SILSESQUIOXANE; LIQUID PHASE; LOW PRESSURES; NANO-IMPRINTING; SPIN-COATING METHOD;

BOILING POINT;

EID: 84255189722     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3653227     Document Type: Article

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